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Egbert Oesterschulze
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Kaiserslantern, DE
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Patents Grants
last 30 patents
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Patent Grant
Aperture in a semiconductor material, and the production and use th...
Patent number
6,794,296
Issue date
Sep 21, 2004
Universitat Gesamthochschule Kassel
Rainer Kassing
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Method for producing at least one small opening in a layer on a sub...
Publication number
20060165957
Publication date
Jul 27, 2006
Egbert Oesterschulze
B81 - MICRO-STRUCTURAL TECHNOLOGY