Egbert Vetter

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Gelenau, DE

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Patents Grantslast 30 patents

Information Patent Grant
Micromechanical accelerometer with plate-like semiconductor wafers
- Patent number 5,614,742
- Issue date Mar 25, 1997
- Litef GmbH
- Thomas Gessner
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical accelerometer and method of manufacture thereof
- Patent number 5,504,032
- Issue date Apr 2, 1996
- Litef GmbH
- Thomas Gessner
- G01 - MEASURING TESTING