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Cathodic sputtering device
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Patent number 6,096,180
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Issue date Aug 1, 2000
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Singulus Technologies AG
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Eggo Sichmann
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Device for cathode sputtering
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Patent number 5,863,399
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Issue date Jan 26, 1999
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Singulus Technologies GmbH
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Eggo Sichmann
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H01 - BASIC ELECTRIC ELEMENTS
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Apparatus for cathode sputtering
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Patent number 5,330,632
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Issue date Jul 19, 1994
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Leybold Aktiengesellschaft
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Eggo Sichmann
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering cathode
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Patent number 5,266,178
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Issue date Nov 30, 1993
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Leybold Aktiengesellschaft
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Eggo Sichmann
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H01 - BASIC ELECTRIC ELEMENTS
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