Egidijus VANAGAS

Follow

Person

Vilnius, LT

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-segment focusing lens and the laser processing for wafer dici...
- Patent number 11,253,955
- Issue date Feb 22, 2022
- EVANA TECHNOLOGIES, UAB
- Egidijus Vanagas
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of laser scribing of semiconductor workpiece using divided l...
- Patent number 10,916,461
- Issue date Feb 9, 2021
- EVANA TECHNOLOGIES, UAB
- Egidijus Vanagas
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of laser processing for substrate cleaving or dicing through...
- Patent number 10,074,565
- Issue date Sep 11, 2018
- EVANA TECHNOLOGIES, UAB
- Egidijus Vanagas
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LASER PROCESSING METHOD AND A SYSTEM FOR WAFER DICING OR CUTTING BY...
- Publication number 20190217420
- Publication date Jul 18, 2019
- EVANA TECHNOLOGIES, UAB
- Egidijus VANAGAS
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF LASER SCRIBING OF SEMICONDUCTOR WORKPIECE USING DIVIDED L...
- Publication number 20190139799
- Publication date May 9, 2019
- EVANA TECHNOLOGIES, UAB
- Egidijus VANAGAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF LASER PROCESSING FOR SUBSTRATE CLEAVING OR DICING THROUGH...
- Publication number 20170250113
- Publication date Aug 31, 2017
- EVANA TECHNOLOGIES, UAB
- Egidijus VANAGAS
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR