Eigo KAWAKAMI

Person

Utsunomiya, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Transfer apparatus and method of manufacturing device
- Patent number 9,188,854
- Issue date Nov 17, 2015
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting apparatus and method therefor
- Patent number 9,039,402
- Issue date May 26, 2015
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting machine and device manufacturing method
- Patent number 8,834,144
- Issue date Sep 16, 2014
- Canon Kabushiki Kaisha
- Takashi Nakamura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 8,770,964
- Issue date Jul 8, 2014
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 8,734,701
- Issue date May 27, 2014
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern transferring apparatus and pattern transferring method
- Patent number 8,616,874
- Issue date Dec 31, 2013
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 8,414,279
- Issue date Apr 9, 2013
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 8,404,169
- Issue date Mar 26, 2013
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus
- Patent number 8,393,885
- Issue date Mar 12, 2013
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Transfer apparatus and method of manufacturing device
- Patent number 8,226,392
- Issue date Jul 24, 2012
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus and method
- Patent number 7,846,346
- Issue date Dec 7, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting machine and device manufacturing method
- Patent number 7,815,424
- Issue date Oct 19, 2010
- Canon Kabushiki Kaisha
- Takashi Nakamura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus
- Patent number 7,815,425
- Issue date Oct 19, 2010
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing method
- Patent number 7,807,065
- Issue date Oct 5, 2010
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus and method
- Patent number 7,789,647
- Issue date Sep 7, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 7,785,091
- Issue date Aug 31, 2010
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,719,659
- Issue date May 18, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern transferring mold, pattern transferring apparatus and devic...
- Patent number 7,690,912
- Issue date Apr 6, 2010
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processing method and system
- Patent number 7,649,184
- Issue date Jan 19, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus
- Patent number 7,381,272
- Issue date Jun 3, 2008
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,382,434
- Issue date Jun 3, 2008
- Canon Kabushiki Kaisha
- Eigo Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,236,231
- Issue date Jun 26, 2007
- Canon Kabushiki Kaisha
- Takashi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, device manufacturing method, pattern generator...
- Patent number 7,233,383
- Issue date Jun 19, 2007
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fine pattern forming apparatus and fine pattern inspecting apparatus
- Patent number 7,196,321
- Issue date Mar 27, 2007
- Canon Kabushiki Kaisha
- Eigo Kawakami
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,180,575
- Issue date Feb 20, 2007
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, atmosphere substituting method, exposure app...
- Patent number 6,990,173
- Issue date Jan 24, 2006
- Canon Kabushiki Kaisha
- Eigo Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microprobe, preparation thereof and electronic device by use of sai...
- Patent number 5,994,698
- Issue date Nov 30, 1999
- Canon Kabushiki Kaisha
- Hisaaki Kawade
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Two scanning probes information recording/reproducing system with o...
- Patent number 5,721,721
- Issue date Feb 24, 1998
- Canon Kabushiki Kaisha
- Yoshihiro Yanagisawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate conveying device and method of controlling the same
- Patent number 5,641,264
- Issue date Jun 24, 1997
- Canon Kabushiki Kaisha
- Mitsutoshi Kuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Encoder for controlling measurements in the range of a few angstroms
- Patent number 5,519,686
- Issue date May 21, 1996
- Canon Kabushiki Kaisha
- Yoshihiro Yanagisawa
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PATTERN TRANSFERRING APPARATUS AND PATTERN TRANSFERRING METHOD
- Publication number 20140151936
- Publication date Jun 5, 2014
- Canon Kabushiki Kaisha
- Kazuyuki KASUMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
TRANSFER APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20110316193
- Publication date Dec 29, 2011
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20110169181
- Publication date Jul 14, 2011
- Canon Kabushiki Kaisha
- Eigo KAWAKAMI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20100314798
- Publication date Dec 16, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESSING APPARATUS AND METHOD
- Publication number 20100289190
- Publication date Nov 18, 2010
- Eigo Kawakami
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINTING MACHINE AND DEVICE MANUFACTURING METHOD
- Publication number 20100148397
- Publication date Jun 17, 2010
- Canon Kabushiki Kaisha
- Takashi NAKAMURA
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20100078840
- Publication date Apr 1, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20100072664
- Publication date Mar 25, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINTING APPARATUS AND METHOD THEREFOR
- Publication number 20100072653
- Publication date Mar 25, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20100072649
- Publication date Mar 25, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINTING METHOD
- Publication number 20100072667
- Publication date Mar 25, 2010
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
TRANSFER APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20090295006
- Publication date Dec 3, 2009
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PROCESSING APPARATUS
- Publication number 20080254626
- Publication date Oct 16, 2008
- Canon Kabushiki Kaisha
- Kazuyuki KASUMI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080186463
- Publication date Aug 7, 2008
- Eigo Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080093339
- Publication date Apr 24, 2008
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PROCESSING METHOD
- Publication number 20070132157
- Publication date Jun 14, 2007
- Toshinobu Tokita
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern transferring mold, pattern transferring apparatus and devic...
- Publication number 20060192320
- Publication date Aug 31, 2006
- Toshinobu Tokita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Pattern transferring apparatus and pattern transferring method
- Publication number 20060192928
- Publication date Aug 31, 2006
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Imprinting machine and device manufacturing method
- Publication number 20060157444
- Publication date Jul 20, 2006
- Takashi Nakamura
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060087635
- Publication date Apr 27, 2006
- Kazuyuki Kazumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus and method
- Publication number 20050275125
- Publication date Dec 15, 2005
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
Fine pattern forming apparatus and fine pattern inspecting apparatus
- Publication number 20050269035
- Publication date Dec 8, 2005
- Eigo Kawakami
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus, and method, device manufacturing method, patter...
- Publication number 20050248659
- Publication date Nov 10, 2005
- Kazuyuki Kasumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, device manufacturing method, pattern generator...
- Publication number 20050237375
- Publication date Oct 27, 2005
- Toshinobu Tokita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus
- Publication number 20050230346
- Publication date Oct 20, 2005
- Kazuyuki Kasumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20050219485
- Publication date Oct 6, 2005
- Takashi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus
- Publication number 20050212156
- Publication date Sep 29, 2005
- Toshinobu Tokita
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20050146695
- Publication date Jul 7, 2005
- Eigo Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing method and system
- Publication number 20040222383
- Publication date Nov 11, 2004
- Eigo Kawakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Eigo KAWAKAMI

Person

Patents Grantslast 30 patents

Transfer apparatus and method of manufacturing device

Imprinting apparatus and method therefor

Imprinting machine and device manufacturing method

Imprint apparatus and article manufacturing method

Imprint apparatus and method of manufacturing article

Pattern transferring apparatus and pattern transferring method

Imprint apparatus and article manufacturing method

Imprint apparatus and method of manufacturing article

Processing apparatus

Transfer apparatus and method of manufacturing device

Processing apparatus and method

Imprinting machine and device manufacturing method

Processing apparatus

Processing method

Processing apparatus and method

Processing apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Pattern transferring mold, pattern transferring apparatus and devic...

Processing method and system

Processing apparatus

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus, device manufacturing method, pattern generator...

Fine pattern forming apparatus and fine pattern inspecting apparatus

Exposure apparatus and device manufacturing method

Positioning apparatus, atmosphere substituting method, exposure app...

Microprobe, preparation thereof and electronic device by use of sai...

Two scanning probes information recording/reproducing system with o...

Substrate conveying device and method of controlling the same

Encoder for controlling measurements in the range of a few angstroms

Patents Applicationslast 30 patents

PATTERN TRANSFERRING APPARATUS AND PATTERN TRANSFERRING METHOD

TRANSFER APPARATUS AND METHOD OF MANUFACTURING DEVICE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

PROCESSING APPARATUS AND METHOD

IMPRINTING MACHINE AND DEVICE MANUFACTURING METHOD

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINTING APPARATUS AND METHOD THEREFOR

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINTING METHOD

TRANSFER APPARATUS AND METHOD OF MANUFACTURING DEVICE

PROCESSING APPARATUS

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

PROCESSING METHOD

Pattern transferring mold, pattern transferring apparatus and devic...

Pattern transferring apparatus and pattern transferring method

Imprinting machine and device manufacturing method

Exposure apparatus and device manufacturing method

Processing apparatus and method

Fine pattern forming apparatus and fine pattern inspecting apparatus

Exposure apparatus, and method, device manufacturing method, patter...

Exposure apparatus, device manufacturing method, pattern generator...

Processing apparatus

Exposure apparatus and device manufacturing method

Processing apparatus

Exposure apparatus and device manufacturing method

Processing method and system