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Stage drive device
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Patent number 8,638,026
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Issue date Jan 28, 2014
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Hitachi High-Technologies Corporation
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Masashi Shibahara
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Defect inspecting apparatus
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Patent number 7,129,727
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Issue date Oct 31, 2006
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Hitachi High-Technologies Corporation
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Tsutomu Saito
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G01 - MEASURING TESTING
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Focused ion beam system
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Patent number 7,015,483
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Issue date Mar 21, 2006
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Hitachi High-Technologies Corporation
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Wataru Suzuki
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H01 - BASIC ELECTRIC ELEMENTS
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Particle beam surface analyzer
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Patent number 5,026,995
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Issue date Jun 25, 1991
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Hitachi, Ltd.
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Eiichi Hazaki
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Thrust bearing
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Patent number 4,639,146
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Issue date Jan 27, 1987
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Hitachi, Ltd.
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Masahiro Yoshioka
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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