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Eiichi Mizuno
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Shizuoka, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for forming tungsten nitride film
Patent number
7,338,900
Issue date
Mar 4, 2008
Ulvac Inc.
Eiichi Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method for forming tungsten nitride film
Publication number
20050221625
Publication date
Oct 6, 2005
ULVAC, Inc.
Eiichi Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...