Eiichi Mukai

Follow

Person

Kurume, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 6,861,371
- Issue date Mar 1, 2005
- Tokyo Electron Limited
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Substrates-washing apparatus
- Patent number 5,503,171
- Issue date Apr 2, 1996
- Tokyo Electron Limited
- Kenji Yokomizo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate washing device
- Patent number 5,370,142
- Issue date Dec 6, 1994
- Tokyo Electron Limited
- Mitsuo Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Washing system
- Patent number 5,301,700
- Issue date Apr 12, 1994
- Tokyo Electron Limited
- Yuuji Kamikawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing system and substrate processing method
- Publication number 20030084929
- Publication date May 8, 2003
- Yuji Kamikawa
- B08 - CLEANING