Eiichi Sugawara

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,328,910
- Issue date May 10, 2022
- Tokyo Electron Limited
- Eiichi Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,224,226
- Issue date Mar 5, 2019
- Tokyo Electron Limited
- Eiichi Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,799,542
- Issue date Oct 24, 2017
- Tokyo Electron Limited
- Eiichi Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Turbomolecular pump, and particle trap for turbomolecular pump
- Patent number 8,894,355
- Issue date Nov 25, 2014
- Shimadzu Corporation
- Yukiteru Sekita
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Reflecting device, communicating pipe, exhausting pump, exhaust sys...
- Patent number 8,727,708
- Issue date May 20, 2014
- Tokyo Electron Limited
- Tsuyoshi Moriya
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Exhaust pump, communicating pipe, and exhaust system
- Patent number 8,356,970
- Issue date Jan 22, 2013
- Tokyo Electron Limited
- Eiichi Sugawara
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Cleaning method for turbo molecular pump
- Patent number 8,062,432
- Issue date Nov 22, 2011
- Tokyo Electron Limited
- Eiichi Sugawara
- B08 - CLEANING
Information Patent Grant
Reflecting device, communicating pipe, exhausting pump, exhaust sys...
- Patent number 7,927,066
- Issue date Apr 19, 2011
- Tokyo Electron Limited
- Tsuyoshi Moriya
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220230857
- Publication date Jul 21, 2022
- TOKYO ELECTRON LIMITED
- Eiichi SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190109031
- Publication date Apr 11, 2019
- TOKYO ELECTRON LIMITED
- Eiichi SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180019145
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Eiichi SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20120247671
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Eiichi SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TURBOMOLECULAR PUMP, AND PARTICLE TRAP FOR TURBOMOLECULAR PUMP
- Publication number 20110293401
- Publication date Dec 1, 2011
- TOKYO ELECTRON LIMITED
- Yukiteru Sekita
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
REFLECTING DEVICE, COMMUNICATING PIPE, EXHAUSTING PUMP, EXHAUST SYS...
- Publication number 20110162678
- Publication date Jul 7, 2011
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
VALVE ELEMENT, PARTICLE ENTRY PREVENTIVE MECHANISM, EXHAUST CONTROL...
- Publication number 20100043894
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD FOR TURBO MOLECULAR PUMP
- Publication number 20080236629
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Eiichi Sugawara
- B08 - CLEANING
Information Patent Application
EXHAUST PUMP, COMMUNICATING PIPE, AND EXHAUST SYSTEM
- Publication number 20080240905
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Eiichi SUGAWARA
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Reflecting device, communicating pipe, exhausting pump, exhaust sys...
- Publication number 20060257243
- Publication date Nov 16, 2006
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Eiichi Sugawara

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Turbomolecular pump, and particle trap for turbomolecular pump

Reflecting device, communicating pipe, exhausting pump, exhaust sys...

Exhaust pump, communicating pipe, and exhaust system

Cleaning method for turbo molecular pump

Reflecting device, communicating pipe, exhausting pump, exhaust sys...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

TURBOMOLECULAR PUMP, AND PARTICLE TRAP FOR TURBOMOLECULAR PUMP

REFLECTING DEVICE, COMMUNICATING PIPE, EXHAUSTING PUMP, EXHAUST SYS...

VALVE ELEMENT, PARTICLE ENTRY PREVENTIVE MECHANISM, EXHAUST CONTROL...

CLEANING METHOD FOR TURBO MOLECULAR PUMP

EXHAUST PUMP, COMMUNICATING PIPE, AND EXHAUST SYSTEM

Reflecting device, communicating pipe, exhausting pump, exhaust sys...