Eiichi Yamamoto

Person

Isehara-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device and apparatus for man...
- Patent number 12,068,165
- Issue date Aug 20, 2024
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for manufacturing semiconductor device
- Patent number 11,735,411
- Issue date Aug 22, 2023
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi Yamamoto
- B24 - GRINDING POLISHING
Information Patent Grant
Electrostatic attachment chuck, method for manufacturing the same,...
- Patent number 10,964,576
- Issue date Mar 30, 2021
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor apparatus
- Patent number 10,763,171
- Issue date Sep 1, 2020
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate planarization apparatus and planarization m...
- Patent number 8,366,514
- Issue date Feb 5, 2013
- Okamoto Machine Tool Works, Ltd.
- Satoru Ide
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MAN...
- Publication number 20220293425
- Publication date Sep 15, 2022
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi YAMAMOTO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200066507
- Publication date Feb 27, 2020
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi YAMAMOTO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190244858
- Publication date Aug 8, 2019
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC ATTACHMENT CHUCK, METHOD FOR MANUFACTURING THE SAME,...
- Publication number 20180315635
- Publication date Nov 1, 2018
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi YAMAMOTO
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR SUBSTRATE PLANARIZATION APPARATUS AND PLANARIZATION M...
- Publication number 20110165823
- Publication date Jul 7, 2011
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Satoru IDE
- B24 - GRINDING POLISHING
Information Patent Application
Dressing tool, dressing device, dressing method, processing device...
- Publication number 20060292969
- Publication date Dec 28, 2006
- NIKON CORPORATION
- Susumu Hoshino
- B24 - GRINDING POLISHING
Information Patent Application
Dressing tool, dressing device, dressing method, processing device...
- Publication number 20050032467
- Publication date Feb 10, 2005
- NIKON CORPORATION
- Susumu Hoshino
- B24 - GRINDING POLISHING
Information Patent Application
Chemical-mechanical polishing apparatus, polishing pad and method f...
- Publication number 20030168169
- Publication date Sep 11, 2003
- Akira Ishikawa
- B24 - GRINDING POLISHING

Eiichi Yamamoto

Person

Patents Grantslast 30 patents

Method for manufacturing semiconductor device and apparatus for man...

Method and apparatus for manufacturing semiconductor device

Electrostatic attachment chuck, method for manufacturing the same,...

Method of manufacturing semiconductor apparatus

Semiconductor substrate planarization apparatus and planarization m...

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MAN...

METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

ELECTROSTATIC ATTACHMENT CHUCK, METHOD FOR MANUFACTURING THE SAME,...

SEMICONDUCTOR SUBSTRATE PLANARIZATION APPARATUS AND PLANARIZATION M...

Dressing tool, dressing device, dressing method, processing device...

Dressing tool, dressing device, dressing method, processing device...

Chemical-mechanical polishing apparatus, polishing pad and method f...