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Eiichiro Hayashi
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Hikone, JP
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last 30 patents
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Patent Grant
Apparatus and method for rinsing and drying substrate
Patent number
5,331,987
Issue date
Jul 26, 1994
Dainippon Screen Mfg. Co. Ltd.
Eiichiro Hayashi
B08 - CLEANING
Information
Patent Grant
Roll coating apparatus for forming a film of a high viscosity coati...
Patent number
4,949,667
Issue date
Aug 21, 1990
Dainippon Screen Mfg. Co., Ltd.
Toshio Yoshida
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Roll coater control method and roll coater
Patent number
4,737,378
Issue date
Apr 12, 1988
Dainippon Screen Mfg. Co., Ltd.
Katsunaga Narita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY