Eiichiro Okamoto

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Measurement processing device, substrate processing system, measure...
- Patent number 10,713,772
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Yoshifumi Amano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 9,895,711
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Jian Zhang
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,818,626
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,793,142
- Issue date Oct 17, 2017
- Tokyo Electron Limited
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, method for controlling substrate proce...
- Patent number 9,782,807
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 9,536,761
- Issue date Jan 3, 2017
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20160221046
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Jian Zhang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MEASUREMENT PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, MEASURE...
- Publication number 20160148366
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20160064256
- Publication date Mar 3, 2016
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, METHOD FOR CONTROLLING SUBSTRATE PROCE...
- Publication number 20150013722
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140116478
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140116480
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS