Eiichiro Shiba

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for stabilizing reaction chamber pressure
- Patent number 12,098,460
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming patterned structures including silico...
- Patent number 12,100,597
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating layer structure having target topological pr...
- Patent number 11,961,741
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Eiichiro Shiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing material on stepped structure
- Patent number 11,827,981
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Kentaro Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming precoat film and method for forming silicon-cont...
- Patent number 11,821,078
- Issue date Nov 21, 2023
- ASM IP Holding B.V.
- Takeru Kuwano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming silicon nitride film selectively on top/bottom p...
- Patent number 11,676,812
- Issue date Jun 13, 2023
- ASM IP Holding B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming silicon nitride film selectively on top surface
- Patent number 10,720,322
- Issue date Jul 21, 2020
- ASM IP Holding B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming silicon nitride film selectively on sidewalls or...
- Patent number 10,529,554
- Issue date Jan 7, 2020
- ASM IP Holding B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming aluminum nitride-based film by PEALD
- Patent number 9,711,345
- Issue date Jul 18, 2017
- ASM IP Holding B.V.
- Eiichiro Shiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for performing uniform processing in gas system-sharing mult...
- Patent number 9,447,498
- Issue date Sep 20, 2016
- ASM IP Holding B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...
- Publication number 20240128090
- Publication date Apr 18, 2024
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MITIGATING UNDERLAYER DAMAGE DURING FORMATION...
- Publication number 20220319833
- Publication date Oct 6, 2022
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING PATTERNED STRUCTURES INCLUDING SILICO...
- Publication number 20220319858
- Publication date Oct 6, 2022
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING MATERIAL ON STEPPED STRUCTURE
- Publication number 20220112602
- Publication date Apr 14, 2022
- ASM IP HOLDING B.V.
- Kentaro Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON NITRIDE AND SILICON OXIDE DEPOSITION METHODS USING FLUORINE...
- Publication number 20220005693
- Publication date Jan 6, 2022
- ASM IP HOLDING B.V.
- Takashi Mizoguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING PRECOAT FILM AND METHOD FOR FORMING SILICON-CONT...
- Publication number 20210324510
- Publication date Oct 21, 2021
- ASM IP HOLDING B.V.
- Takeru Kuwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...
- Publication number 20210287912
- Publication date Sep 16, 2021
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR STABILIZING REACTION CHAMBER PRESSURE
- Publication number 20210230746
- Publication date Jul 29, 2021
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON TOP/BOTTOM P...
- Publication number 20200321209
- Publication date Oct 8, 2020
- ASM IP HOLDING B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OF...
- Publication number 20190057857
- Publication date Feb 21, 2019
- ASM IP HOLDING B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OR...
- Publication number 20170250068
- Publication date Aug 31, 2017
- ASM IP HOLDING B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING ALUMINUM NITRIDE-BASED FILM BY PEALD
- Publication number 20170062209
- Publication date Mar 2, 2017
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Performing Uniform Processing in Gas System-Sharing Mult...
- Publication number 20150267297
- Publication date Sep 24, 2015
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Eiichiro Shiba

Person

Patents Grantslast 30 patents

Systems and methods for stabilizing reaction chamber pressure

Method and system for forming patterned structures including silico...

Method for fabricating layer structure having target topological pr...

Method of depositing material on stepped structure

Method for forming precoat film and method for forming silicon-cont...

Method for forming silicon nitride film selectively on top/bottom p...

Method for forming silicon nitride film selectively on top surface

Method for forming silicon nitride film selectively on sidewalls or...

Method for forming aluminum nitride-based film by PEALD

Method for performing uniform processing in gas system-sharing mult...

Patents Applicationslast 30 patents

METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...

METHOD AND SYSTEM FOR MITIGATING UNDERLAYER DAMAGE DURING FORMATION...

METHOD AND SYSTEM FOR FORMING PATTERNED STRUCTURES INCLUDING SILICO...

METHOD OF DEPOSITING MATERIAL ON STEPPED STRUCTURE

SILICON NITRIDE AND SILICON OXIDE DEPOSITION METHODS USING FLUORINE...

METHOD FOR FORMING PRECOAT FILM AND METHOD FOR FORMING SILICON-CONT...

METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...

SYSTEMS AND METHODS FOR STABILIZING REACTION CHAMBER PRESSURE

METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON TOP/BOTTOM P...

METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OF...

METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OR...

METHOD FOR FORMING ALUMINUM NITRIDE-BASED FILM BY PEALD

Method for Performing Uniform Processing in Gas System-Sharing Mult...