Eiichiro Takanabe

Person

Kangawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Single-substrate-treating apparatus for semiconductor processing sy...
- Patent number 6,402,848
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Takahiro Horiguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment process for preventing slips in semiconductor wafers
- Patent number 5,775,889
- Issue date Jul 7, 1998
- Tokyo Electron Limited
- Junichi Kobayashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment process
- Patent number 5,688,116
- Issue date Nov 18, 1997
- Tokyo Electron Limited
- Junichi Kobayashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical heat-treating apparatus and heat-treating process by using...
- Patent number 5,388,944
- Issue date Feb 14, 1995
- Tokyo Electron Tohoku Kabushiki Kaisha
- Eiichiro Takanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafers transferring method in vertical type heat treatment apparatu...
- Patent number 5,277,579
- Issue date Jan 11, 1994
- Tokyo Electron Sagami Limited
- Eiichiro Takanabe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate transfer device
- Patent number 5,030,056
- Issue date Jul 9, 1991
- Tokyo Electron Sagami Ltd.
- Hirofumi Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treatment using gas
- Patent number 5,016,567
- Issue date May 21, 1991
- Tel Sagami Limited
- Katsuhiko Iwabuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Eiichiro Takanabe

Person

Patents Grantslast 30 patents

Single-substrate-treating apparatus for semiconductor processing sy...

Heat treatment process for preventing slips in semiconductor wafers

Heat treatment process

Vertical heat-treating apparatus and heat-treating process by using...

Wafers transferring method in vertical type heat treatment apparatu...

Substrate transfer device

Apparatus for treatment using gas