Eiji Fukatsu

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment device and substrate treatment method
- Patent number 12,183,599
- Issue date Dec 31, 2024
- SCREEN Holdings Co., Ltd.
- Masafumi Inoue
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,961,744
- Issue date Apr 16, 2024
- SCREEN Holdings Co., Ltd.
- Eiji Fukatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for treating substrate with predeter...
- Patent number 7,935,217
- Issue date May 3, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki Yashiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate position correcting method and apparatus using either sub...
- Patent number 7,547,181
- Issue date Jun 16, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Fukatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method whic...
- Patent number 7,503,978
- Issue date Mar 17, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus and sub...
- Patent number 7,384,484
- Issue date Jun 10, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Yusuke Muraoka
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and apparatus for transferring an article to be processed an...
- Patent number 7,246,984
- Issue date Jul 24, 2007
- Kabushiki Kaisha Kobe Seiko Sho
- Shogo Sarumaru
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD
- Publication number 20210391188
- Publication date Dec 16, 2021
- SCREEN Holdings Co., Ltd.
- Masafumi INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210013059
- Publication date Jan 14, 2021
- SCREEN Holdings Co., Ltd.
- Eiji FUKATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus of and substrate processing method f...
- Publication number 20060185792
- Publication date Aug 24, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki Yashiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, substrate processing method, substr...
- Publication number 20060102289
- Publication date May 18, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Fukatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method whic...
- Publication number 20050284369
- Publication date Dec 29, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for transferring an article to be processed an...
- Publication number 20040240970
- Publication date Dec 2, 2004
- Kabushiki Kaisha Kobe Seiko Sho
- Shogo Saramaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, substrate processing apparatus and sub...
- Publication number 20040105936
- Publication date Jun 3, 2004
- DAINIPPON SCREEN MFG. CO. LTD.
- Yusuke Muraoka
- G11 - INFORMATION STORAGE

Eiji Fukatsu

Person

Patents Grantslast 30 patents

Substrate treatment device and substrate treatment method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus for treating substrate with predeter...

Substrate position correcting method and apparatus using either sub...

Substrate processing apparatus and substrate processing method whic...

Substrate processing method, substrate processing apparatus and sub...

Method and apparatus for transferring an article to be processed an...

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate processing apparatus of and substrate processing method f...

Substrate processing apparatus, substrate processing method, substr...

Substrate processing apparatus and substrate processing method whic...

Method and apparatus for transferring an article to be processed an...

Substrate processing method, substrate processing apparatus and sub...