Eiji Kikama

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,725,284
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Eiji Kikama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and method for monitoring process data
- Patent number 11,567,485
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Nobutoshi Terasawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 10,968,515
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Eiji Kikama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming blocking silicon oxide film, and storage medium
- Patent number 10,964,530
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Kyungseok Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming method and film-forming apparatus
- Patent number 10,781,515
- Issue date Sep 22, 2020
- Tokyo Electron Limited
- Kyungseok Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming silicon oxide film, and storage me...
- Patent number 10,553,686
- Issue date Feb 4, 2020
- TOKYO ELECTRONC LIMITED
- Kyungseok Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method, film formation apparatus, and method for usi...
- Patent number 8,338,312
- Issue date Dec 25, 2012
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS
- Publication number 20220270940
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210371983
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Eiji KIKAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR MONITORING PROCESS DATA
- Publication number 20210011468
- Publication date Jan 14, 2021
- TOKYO ELECTRON LIMITED
- Nobutoshi TERASAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Film-Forming Method and Film-Forming Apparatus
- Publication number 20190271074
- Publication date Sep 5, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical Heat Treatment Apparatus
- Publication number 20190186014
- Publication date Jun 20, 2019
- TOKYO ELECTRON LIMITED
- Eiji Kikama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM
- Publication number 20190131126
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Forming Silicon Oxide Film, and Storage Me...
- Publication number 20190080913
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD, FILM FORMATION APPARATUS, AND METHOD FOR USI...
- Publication number 20110201210
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Eiji Kikama

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing system and method for monitoring process data

Vertical heat treatment apparatus

Method of forming blocking silicon oxide film, and storage medium

Film-forming method and film-forming apparatus

Method and apparatus for forming silicon oxide film, and storage me...

Film formation method, film formation apparatus, and method for usi...

Patents Applicationslast 30 patents

ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR MONITORING PROCESS DATA

Film-Forming Method and Film-Forming Apparatus

Vertical Heat Treatment Apparatus

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

Method and Apparatus for Forming Silicon Oxide Film, and Storage Me...

FILM FORMATION METHOD, FILM FORMATION APPARATUS, AND METHOD FOR USI...