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Patents Grantslast 30 patents

Information Patent Grant
Measuring method and measuring device
- Patent number 11,791,182
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Yuji Mimura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate holding apparatus and substrate holding method
- Patent number 9,343,349
- Issue date May 17, 2016
- Tokyo Electron Limited
- Yasuharu Iwashita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
BONDING SYSTEM AND INSPECTION METHOD OF INSPECTING COMBINED SUBSTRATE
- Publication number 20220415673
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Yoshitaka Otsuka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASURING METHOD AND MEASURING DEVICE
- Publication number 20210249287
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Yuji Mimura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEPARATION APPARATUS, SEPARATION SYSTEM, SEPARATION METHOD AND NON-...
- Publication number 20140284000
- Publication date Sep 25, 2014
- Yasutaka SOMA
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD
- Publication number 20130264780
- Publication date Oct 10, 2013
- TOKYO ELECTRON LIMITED
- Yasuharu IWASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLEANING APPARATUS, SEPARATION SYSTEM AND CLEANING METHOD
- Publication number 20130118530
- Publication date May 16, 2013
- TOKYO ELECTRON LIMITED
- Hiroshi KOMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND CLEANING APPARATUS
- Publication number 20130000684
- Publication date Jan 3, 2013
- TOKYO ELECTRON LIMITED
- Yasutaka SOMA
- B32 - LAYERED PRODUCTS