Eiji Murakami

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged beam exposure system
- Patent number 6,566,662
- Issue date May 20, 2003
- Kabushiki Kaisha Toshiba
- Eiji Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure apparatus
- Patent number 6,319,642
- Issue date Nov 20, 2001
- Kabushiki Kaisha Toshiba
- Shigehiro Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged beam lithography system
- Patent number 6,313,476
- Issue date Nov 6, 2001
- Kabushiki Kaisha Toshiba
- Mitsuko Shimizu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for generating exposure data for lithographic apparatus
- Patent number 6,047,116
- Issue date Apr 4, 2000
- Kabushiki Kaisha Toshiba
- Eiji Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam drawing method
- Patent number 5,894,057
- Issue date Apr 13, 1999
- Kabushiki Kaisha Toshiba
- Toshio Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY