Eiji Nishimura

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of correcting astigmatism of variable shaped beam
- Patent number 5,047,646
- Issue date Sep 10, 1991
- Kabushiki Kaisha Toshiba
- Kiyoshi Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a fine pattern with a charged particle beam
- Patent number 4,712,013
- Issue date Dec 8, 1987
- Kabushiki Kaisha Toshiba
- Eiji Nishimura
- B82 - NANO-TECHNOLOGY