Eiji Okuno

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate transfer method
- Patent number 8,157,496
- Issue date Apr 17, 2012
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding device and substrate processing apparatus
- Patent number 7,513,263
- Issue date Apr 7, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 7,407,363
- Issue date Aug 5, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding and rotating apparatus
- Patent number 7,354,481
- Issue date Apr 8, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Okuno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20070081881
- Publication date Apr 12, 2007
- Eiji Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate transport apparatus and substrate transport method
- Publication number 20060245853
- Publication date Nov 2, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate holding device and substrate processing apparatus
- Publication number 20060081274
- Publication date Apr 20, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate holding and rotating apparatus
- Publication number 20060054082
- Publication date Mar 16, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Okuno
- H01 - BASIC ELECTRIC ELEMENTS