Eiji Osanai

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Stage system and exposure apparatus with the same
- Patent number 6,408,045
- Issue date Jun 18, 2002
- Canon Kabushiki Kaisha
- Shin Matsui
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Positioning system and position measuring method for use in exposur...
- Patent number 6,285,444
- Issue date Sep 4, 2001
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus and exposure apparatus using the same
- Patent number 6,028,376
- Issue date Feb 22, 2000
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage feeding device
- Patent number 5,939,852
- Issue date Aug 17, 1999
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 5,933,215
- Issue date Aug 3, 1999
- Canon Kabushiki Kaisha
- Mitsuru Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage and exposure apparatus using same
- Patent number 5,909,272
- Issue date Jun 1, 1999
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and exposure apparatus and device producing method...
- Patent number 5,864,389
- Issue date Jan 26, 1999
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system and method and apparatus for device manufacture
- Patent number 5,858,587
- Issue date Jan 12, 1999
- Canon Kabushiki Kaisha
- Yukio Yamane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and method of mounting a substrate on a substrate h...
- Patent number 5,717,482
- Issue date Feb 10, 1998
- Canon Kabushiki Kaisha
- Kotarao Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Weight supporting apparatus
- Patent number 5,701,041
- Issue date Dec 23, 1997
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exposure apparatus including an antivibration control system
- Patent number 5,610,686
- Issue date Mar 11, 1997
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus including a hydrostatic bearing for spacing a...
- Patent number 5,524,502
- Issue date Jun 11, 1996
- Canon Kabushiki Kaisha
- Eiji Osanai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Parallel-moving apparatus and lens moving device in an exposing app...
- Patent number 5,376,988
- Issue date Dec 27, 1994
- Canon Kabushiki Kaisha
- Eiji Osanai
- G02 - OPTICS
Information Patent Grant
Positioning mechanism
- Patent number 5,280,677
- Issue date Jan 25, 1994
- Canon Kabushiki Kaisha
- Tadayuki Kubo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Motion guiding device
- Patent number 5,228,358
- Issue date Jul 20, 1993
- Canon Kabushiki Kaisha
- Shigeo Sakino
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Recording and reproducing apparatus
- Patent number 5,062,020
- Issue date Oct 29, 1991
- Canon Kabushiki Kaisha
- Eiji Osanai
- G11 - INFORMATION STORAGE
Information Patent Grant
Movement guiding mechanism
- Patent number 5,040,431
- Issue date Aug 20, 1991
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Recording and reproducing apparatus using flexible disc
- Patent number 4,814,922
- Issue date Mar 21, 1989
- Canon Kabushiki Kaisha
- Eiji Osanai
- G11 - INFORMATION STORAGE

Eiji Osanai

Person

Patents Grantslast 30 patents

Stage system and exposure apparatus with the same

Positioning system and position measuring method for use in exposur...

Positioning apparatus and exposure apparatus using the same

Stage feeding device

Exposure apparatus and device manufacturing method using the same

Stage and exposure apparatus using same

Stage apparatus and exposure apparatus and device producing method...

Positioning system and method and apparatus for device manufacture

Stage apparatus and method of mounting a substrate on a substrate h...

Weight supporting apparatus

Exposure apparatus including an antivibration control system

Positioning apparatus including a hydrostatic bearing for spacing a...

Parallel-moving apparatus and lens moving device in an exposing app...

Positioning mechanism

Motion guiding device

Recording and reproducing apparatus

Movement guiding mechanism

Recording and reproducing apparatus using flexible disc