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Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus and processing method
- Patent number 6,895,979
- Issue date May 24, 2005
- Tokyo Electron Limited
- Kyouji Kohama
- B08 - CLEANING
Information Patent Grant
Processing apparatus and processing method
- Patent number 6,536,452
- Issue date Mar 25, 2003
- Tokyo Electron Limited
- Kyouji Kohama
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Processing apparatus and processing method
- Publication number 20030127117
- Publication date Jul 10, 2003
- Kyouji Kohama
- B08 - CLEANING