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Eiji Suhara
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Tokyo, JP
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last 30 patents
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Patent Grant
Technique on ozone water for use in cleaning semiconductor substrate
Patent number
7,678,200
Issue date
Mar 16, 2010
Sumitomo Mitsubishi Silicon Corporation
Makoto Takemura
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
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Patent Application
Technique on ozone water for use in cleaning semiconductor substrate
Publication number
20060154837
Publication date
Jul 13, 2006
Echo Giken Co., Ltd.
Makoto Takemura
B08 - CLEANING