Einosuke Tsuda

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Stage device and substrate processing apparatus
- Patent number 12,094,753
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Melvin Verbaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling substrate treatment apparatus, substrate trea...
- Patent number 11,393,696
- Issue date Jul 19, 2022
- Tokyo Electron Limited
- Einosuke Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate stage and substrate processing apparatus
- Patent number 11,281,116
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Einosuke Tsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Source material container
- Patent number 11,193,205
- Issue date Dec 7, 2021
- Tokyo Electron Limited
- Yuichi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate loading mechanism
- Patent number 10,950,417
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Einosuke Tsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide film removing method, oxide film removing apparatus, contact...
- Patent number 9,984,892
- Issue date May 29, 2018
- Tokyo Electron Limited
- Takashi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply device
- Patent number 8,945,306
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Einosuke Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas exhaust system of film-forming apparatus, film-forming apparatu...
- Patent number 8,147,786
- Issue date Apr 3, 2012
- Tokyo Electron Limited
- Einosuke Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240145267
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230096191
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Takeshi ITATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220013402
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Melvin VERBAAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, APPARATUS FOR PROCESSING SUBSTRATE, AND METHOD O...
- Publication number 20220010428
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Toshiki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210302846
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film Forming Apparatus and Film Forming Method
- Publication number 20200291514
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING SUBSTRATE TREATEMENT APPARATUS, SUBSTRATE TRE...
- Publication number 20200243347
- Publication date Jul 30, 2020
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOURCE MATERIAL CONTAINER
- Publication number 20190180988
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE LOADING MECHANISM
- Publication number 20180366303
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE FILM REMOVING METHOD, OXIDE FILM REMOVING APPARATUS, CONTACT...
- Publication number 20180261464
- Publication date Sep 13, 2018
- TOKYO ELECTRON LIMITED
- Takashi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE FILM REMOVING METHOD, OXIDE FILM REMOVING APPARATUS, CONTACT...
- Publication number 20170338120
- Publication date Nov 23, 2017
- TOKYO ELECTRON LIMITED
- Takashi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150322571
- Publication date Nov 12, 2015
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY DEVICE, PROCESSING APPARATUS, PROCESSING METHOD, AND STO...
- Publication number 20140209023
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Einosuke Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS EXHAUST SYSTEM OF FILM-FORMING APPARATUS, FILM-FORMING APPARATU...
- Publication number 20120031334
- Publication date Feb 9, 2012
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY DEVICE, PROCESSING APPARATUS, PROCESSING METHOD, AND STO...
- Publication number 20110098841
- Publication date Apr 28, 2011
- TOKYO ELECTRON LIMITED
- Einosuke Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY DEVICE
- Publication number 20100310772
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Einosuke Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, STORAGE MEDIUM,...
- Publication number 20100272895
- Publication date Oct 28, 2010
- TOKYO ELECTRON LIMITED
- Einosuke Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST STRUCTURE OF FILM-FORMING APPARATUS, FILM-FORMING APPARATUS...
- Publication number 20090191109
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Einosuke Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE ELEMENT, VALVE, SELECTOR VALVE, AND TRAP DEVICE
- Publication number 20090114296
- Publication date May 7, 2009
- TOKYO ELECTRON LIMITED
- Einosuke Tsuda
- H01 - BASIC ELECTRIC ELEMENTS

Einosuke Tsuda

Person

Patents Grantslast 30 patents

Stage device and substrate processing apparatus

Method of controlling substrate treatment apparatus, substrate trea...

Substrate stage and substrate processing apparatus

Source material container

Substrate processing apparatus and substrate loading mechanism

Oxide film removing method, oxide film removing apparatus, contact...

Gas supply device

Gas exhaust system of film-forming apparatus, film-forming apparatu...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

STAGE DEVICE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORT, APPARATUS FOR PROCESSING SUBSTRATE, AND METHOD O...

SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS

Film Forming Apparatus and Film Forming Method

METHOD OF CONTROLLING SUBSTRATE TREATEMENT APPARATUS, SUBSTRATE TRE...

SOURCE MATERIAL CONTAINER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE LOADING MECHANISM

OXIDE FILM REMOVING METHOD, OXIDE FILM REMOVING APPARATUS, CONTACT...

OXIDE FILM REMOVING METHOD, OXIDE FILM REMOVING APPARATUS, CONTACT...

SUBSTRATE PROCESSING APPARATUS

GAS SUPPLY DEVICE, PROCESSING APPARATUS, PROCESSING METHOD, AND STO...

GAS EXHAUST SYSTEM OF FILM-FORMING APPARATUS, FILM-FORMING APPARATU...

GAS SUPPLY DEVICE, PROCESSING APPARATUS, PROCESSING METHOD, AND STO...

GAS SUPPLY DEVICE

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, STORAGE MEDIUM,...

EXHAUST STRUCTURE OF FILM-FORMING APPARATUS, FILM-FORMING APPARATUS...

VALVE ELEMENT, VALVE, SELECTOR VALVE, AND TRAP DEVICE