Eisaku Hayashi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,078,306
- Issue date Dec 13, 2011
- Ebara Corporation
- Hidetaka Nakao
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Polishing apparatus and polishing method
- Publication number 20090111358
- Publication date Apr 30, 2009
- EBARA CORPORATION
- Hidetaka Nakao
- B24 - GRINDING POLISHING