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Eisuke Tanaka
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Itami, JP
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last 30 patents
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Patent Grant
Semiconductor integrated circuit interconnection structures and met...
Patent number
6,130,481
Issue date
Oct 10, 2000
Mitsubishi Denki Kabushiki Kaisha
Shigeru Harada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit interconnection structures
Patent number
5,712,509
Issue date
Jan 27, 1998
Mitsubishi Denki Kabushiki Kaisha
Shigeru Harada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical vapor deposition apparatus having cooling heads adjacent t...
Patent number
4,913,090
Issue date
Apr 3, 1990
Mitsubishi Denki Kabushiki Kaisha
Shigeru Harada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and method for making the same
Patent number
4,884,120
Issue date
Nov 28, 1989
Mitsubishi Denki Kabushiki Kaisha
Hiroshi Mochizuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser polishing semiconductor wafer
Patent number
4,731,516
Issue date
Mar 15, 1988
Mitsubishi Denki Kabushiki Kaisha
Takeshi Noguchi
H01 - BASIC ELECTRIC ELEMENTS