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Ekaterina Mikhailovna VIATKINA
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method to characterize post-processing data in terms of individual...
Patent number
11,709,432
Issue date
Jul 25, 2023
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method of controlling a patterning process, lithographic apparatus,...
Patent number
11,048,174
Issue date
Jun 29, 2021
ASML Netherlands B.V.
Michael Kubis
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR CONTROLLING A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20220236647
Publication date
Jul 28, 2022
ASML NETHERLANDS B.V.
Marc HAUPTMANN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD TO CHARACTERIZE POST-PROCESSING DATA IN TERMS OF INDIVIDUAL...
Publication number
20210389683
Publication date
Dec 16, 2021
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF CONTROLLING A PATTERNING PROCESS, LITHOGRAPHIC APPARATUS,...
Publication number
20200233311
Publication date
Jul 23, 2020
Michael KUBIS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY