Ekaterina Mikhaylichenko

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning method with in-line SPM processing
- Patent number 12,051,599
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface cleaning with directed high pressure chemistry
- Patent number 12,027,382
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Brian K. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pad carrier for horizontal pre-clean module
- Patent number 11,942,319
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Edward Golubovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spray system for slurry reduction during chemical mechanical polish...
- Patent number 11,819,976
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Chih Chung Chou
- B24 - GRINDING POLISHING
Information Patent Grant
Asymmetry correction via variable relative velocity of a wafer
- Patent number 11,764,069
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Jimin Zhang
- B24 - GRINDING POLISHING
Information Patent Grant
Non-contact clean module
- Patent number 11,721,563
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Cleaning system with in-line SPM processing
- Patent number 11,682,567
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-contact clean module
- Patent number 11,289,347
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Jagan Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-contact clean module
- Patent number 11,158,524
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Thin plastic polishing article for CMP applications
- Patent number 10,786,885
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Spray bar design for uniform liquid flow distribution on a substrate
- Patent number 10,751,738
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Systems and methods for rinsing and drying substrates
- Patent number 9,984,867
- Issue date May 29, 2018
- Applied Materials, Inc.
- Ekaterina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Substrate rinsing systems and methods
- Patent number 9,859,135
- Issue date Jan 2, 2018
- Applied Materials, Inc.
- Jonathan S. Frankel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE
- Publication number 20240222152
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Jason A. RYE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE
- Publication number 20240139906
- Publication date May 2, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
SPRAY SYSTEM FOR SLURRY REDUCTION DURING CHEMICAL MECHANICAL POLISH...
- Publication number 20240042571
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Chih Chung CHOU
- B24 - GRINDING POLISHING
Information Patent Application
MINIMIZING SUBSTRATE BOW DURING POLISHING
- Publication number 20240033878
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Eric L. Lau
- B24 - GRINDING POLISHING
Information Patent Application
MONITORING THICKNESS IN FACE-UP POLISHING
- Publication number 20240017371
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Application
MONITORING THICKNESS IN FACE-UP POLISHING WITH ROLLER
- Publication number 20240017376
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Application
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20230356354
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL
- Publication number 20230356355
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING METHOD WITH IN-LINE SPM PROCESSING
- Publication number 20230290652
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Brian J. Brown
- B08 - CLEANING
Information Patent Application
PAD CARRIER ASSEMBLY FOR HORIZONTAL PRE-CLEAN MODULE
- Publication number 20230264319
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE CLEANING WITH DIRECTED HIGH PRESSURE CHEMISTRY
- Publication number 20230178388
- Publication date Jun 8, 2023
- Applied Materials, Inc.
- Brian K. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING SLURRY DISPENSE NOZZLE
- Publication number 20230130235
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Chih Chung Chou
- B24 - GRINDING POLISHING
Information Patent Application
SPRAY SYSTEM FOR SLURRY REDUCTION DURING CHEMICAL MECHANICAL POLISH...
- Publication number 20220410336
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Chih Chung Chou
- B24 - GRINDING POLISHING
Information Patent Application
ASYMMETRY CORRECTION VIA VARIABLE RELATIVE VELOCITY OF A WAFER
- Publication number 20220379428
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Jimin ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLURRY-BASED TEMPERATURE CONTROL FOR CMP
- Publication number 20220281070
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Ekaterina A. Mikhaylichenko
- B24 - GRINDING POLISHING
Information Patent Application
TEMPERATURE CONTROL WITH INTRA-LAYER TRANSITION DURING CMP
- Publication number 20220281061
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Ekaterina A. Mikhaylichenko
- B24 - GRINDING POLISHING
Information Patent Application
ROLLER FOR LOCATION-SPECIFIC WAFER POLISHING
- Publication number 20220281062
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Ekaterina A. Mikhaylichenko
- B24 - GRINDING POLISHING
Information Patent Application
PAD CARRIER FOR HORIZONTAL PRE-CLEAN MODULE
- Publication number 20220199396
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HANDLING IN A MODULAR POLISHING SYSTEM WITH SINGLE SUBSTR...
- Publication number 20220143780
- Publication date May 12, 2022
- Applied Materials, Inc.
- Brian J. BROWN
- B24 - GRINDING POLISHING
Information Patent Application
HORIZONTAL BUFFING MODULE
- Publication number 20220134505
- Publication date May 5, 2022
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B24 - GRINDING POLISHING
Information Patent Application
NON-CONTACT CLEAN MODULE
- Publication number 20220044946
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Jagan RANGARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPM PROCESSING OF SUBSTRATES
- Publication number 20210407824
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Brian J. Brown
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
CLEANING SYSTEM WITH IN-LINE SPM PROCESSING
- Publication number 20210407825
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Brian J. Brown
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
NON-CONTACT CLEAN MODULE
- Publication number 20200043756
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Jagan RANGARAJAN
- B08 - CLEANING
Information Patent Application
THIN PLASTIC POLISHING ARTICLE FOR CMP APPLICATIONS
- Publication number 20180207770
- Publication date Jul 26, 2018
- Applied Materials, Inc.
- Robert D. TOLLES
- B24 - GRINDING POLISHING
Information Patent Application
SPRAY BAR DESIGN FOR UNIFORM LIQUID FLOW DISTRIBUTION ON A SUBSTRATE
- Publication number 20180185857
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- Jagan RANGARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER ASSEMBLY, APPARATUS, AND METHODS
- Publication number 20160201986
- Publication date Jul 14, 2016
- Applied Materials, Inc.
- Edwin Velazquez
- F26 - DRYING
Information Patent Application
SUBSTRATE EDGE RESIDUE REMOVAL SYSTEMS, APPARATUS, AND METHODS
- Publication number 20160178279
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Edwin Velazquez
- B08 - CLEANING
Information Patent Application
SUBSTRATE RINSING SYSTEMS AND METHODS
- Publication number 20160175857
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Jonathan S. Frankel
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEMS AND METHODS FOR RINSING AND DRYING SUBSTRATES
- Publication number 20160181086
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Ekaterina Mikhaylichenko
- B08 - CLEANING

Ekaterina Mikhaylichenko

Person

Patents Grantslast 30 patents

Cleaning method with in-line SPM processing

Surface cleaning with directed high pressure chemistry

Pad carrier for horizontal pre-clean module

Spray system for slurry reduction during chemical mechanical polish...

Asymmetry correction via variable relative velocity of a wafer

Non-contact clean module

Cleaning system with in-line SPM processing

Non-contact clean module

Non-contact clean module

Thin plastic polishing article for CMP applications

Spray bar design for uniform liquid flow distribution on a substrate

Systems and methods for rinsing and drying substrates

Substrate rinsing systems and methods

Patents Applicationslast 30 patents

INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE

CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE

SPRAY SYSTEM FOR SLURRY REDUCTION DURING CHEMICAL MECHANICAL POLISH...

MINIMIZING SUBSTRATE BOW DURING POLISHING

MONITORING THICKNESS IN FACE-UP POLISHING

MONITORING THICKNESS IN FACE-UP POLISHING WITH ROLLER

COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM

POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL

CLEANING METHOD WITH IN-LINE SPM PROCESSING

PAD CARRIER ASSEMBLY FOR HORIZONTAL PRE-CLEAN MODULE

SURFACE CLEANING WITH DIRECTED HIGH PRESSURE CHEMISTRY

POLISHING SLURRY DISPENSE NOZZLE

SPRAY SYSTEM FOR SLURRY REDUCTION DURING CHEMICAL MECHANICAL POLISH...

ASYMMETRY CORRECTION VIA VARIABLE RELATIVE VELOCITY OF A WAFER

SLURRY-BASED TEMPERATURE CONTROL FOR CMP

TEMPERATURE CONTROL WITH INTRA-LAYER TRANSITION DURING CMP

ROLLER FOR LOCATION-SPECIFIC WAFER POLISHING

PAD CARRIER FOR HORIZONTAL PRE-CLEAN MODULE

SUBSTRATE HANDLING IN A MODULAR POLISHING SYSTEM WITH SINGLE SUBSTR...

HORIZONTAL BUFFING MODULE

NON-CONTACT CLEAN MODULE

SPM PROCESSING OF SUBSTRATES

CLEANING SYSTEM WITH IN-LINE SPM PROCESSING

NON-CONTACT CLEAN MODULE

THIN PLASTIC POLISHING ARTICLE FOR CMP APPLICATIONS

SPRAY BAR DESIGN FOR UNIFORM LIQUID FLOW DISTRIBUTION ON A SUBSTRATE

SUBSTRATE HOLDER ASSEMBLY, APPARATUS, AND METHODS

SUBSTRATE EDGE RESIDUE REMOVAL SYSTEMS, APPARATUS, AND METHODS

SUBSTRATE RINSING SYSTEMS AND METHODS

SYSTEMS AND METHODS FOR RINSING AND DRYING SUBSTRATES