Ekmini A. De Silva

Person

Ossining, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Airgap isolation for back-end-of-the-line semiconductor interconnec...
- Patent number 12,125,790
- Issue date Oct 22, 2024
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Litho-litho-etch (LLE) multi color resist
- Patent number 12,033,856
- Issue date Jul 9, 2024
- International Business Machines Corporation
- Yann Mignot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Subtractive patterning of interconnect structures
- Patent number 12,020,949
- Issue date Jun 25, 2024
- International Business Machines Corporation
- Dominik Metzler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Polymer brush adhesion promoter with UV cleavable linker
- Patent number 12,019,376
- Issue date Jun 25, 2024
- International Business Machines Corporation
- Jing Guo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vertical field effect transistor with crosslink fin arrangement
- Patent number 12,002,856
- Issue date Jun 4, 2024
- International Business Machines Corporation
- Indira Seshadri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal cut patterning and etching to minimize interlayer dielectric...
- Patent number 11,990,342
- Issue date May 21, 2024
- International Business Machines Corporation
- Kisup Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective shrink for contact trench
- Patent number 11,935,931
- Issue date Mar 19, 2024
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Via CD controllable top via structure
- Patent number 11,923,246
- Issue date Mar 5, 2024
- International Business Machines Corporation
- Koichi Motoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming self-aligned multi-metal interconnects
- Patent number 11,923,311
- Issue date Mar 5, 2024
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical transport field-effect transistor with gate patterning
- Patent number 11,916,143
- Issue date Feb 27, 2024
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternating copolymer chain scission photoresists
- Patent number 11,906,901
- Issue date Feb 20, 2024
- International Business Machines Corporation
- Dario Goldfarb
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High-density resistive random-access memory array with self-aligned...
- Patent number 11,856,878
- Issue date Dec 26, 2023
- International Business Machines Corporation
- Dexin Kong
Information Patent Grant
Placing top vias at line ends by selective growth of via mask from...
- Patent number 11,830,807
- Issue date Nov 28, 2023
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor boundary protection using reversible crosslinking reflow
- Patent number 11,810,828
- Issue date Nov 7, 2023
- International Business Machines Corporation
- Jing Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer-defined process for lithography-etch double patterning for i...
- Patent number 11,804,401
- Issue date Oct 31, 2023
- International Business Machines Corporation
- Nelson Felix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective encapsulation for metal electrodes of embedded memory dev...
- Patent number 11,778,929
- Issue date Oct 3, 2023
- International Business Machines Corporation
- Ashim Dutta
Information Patent Grant
Staggered stacked vertical crystalline semiconducting channels
- Patent number 11,756,961
- Issue date Sep 12, 2023
- International Business Machines Corporation
- Tsung-Sheng Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Embedded memory pillar
- Patent number 11,751,492
- Issue date Sep 5, 2023
- International Business Machines Corporation
- Dexin Kong
Information Patent Grant
Fabrication of embedded memory devices utilizing a self assembled m...
- Patent number 11,744,083
- Issue date Aug 29, 2023
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inverse tone pillar printing method using organic planarizing layer...
- Patent number 11,699,592
- Issue date Jul 11, 2023
- International Business Machines Corporation
- Nelson Felix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with linerless contacts
- Patent number 11,688,632
- Issue date Jun 27, 2023
- International Business Machines Corporation
- Alex Joseph Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin on scaffold film for forming topvia
- Patent number 11,688,636
- Issue date Jun 27, 2023
- International Business Machines Corporation
- Somnath Ghosh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV pattern transfer using graded hardmask
- Patent number 11,681,213
- Issue date Jun 20, 2023
- International Business Machines Corporation
- Nelson Felix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of back-end-of-line interconnects
- Patent number 11,682,558
- Issue date Jun 20, 2023
- International Business Machines Corporation
- Chi-Chun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical field effect transistor with crosslink fin arrangement
- Patent number 11,621,326
- Issue date Apr 4, 2023
- International Business Machines Corporation
- Indira Seshadri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric structure to prevent hard mask erosion
- Patent number 11,562,908
- Issue date Jan 24, 2023
- International Business Machines Corporation
- Tao Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using E0 exposures for track/cluster monitoring
- Patent number 11,561,481
- Issue date Jan 24, 2023
- International Business Machines Corporation
- Cody J. Murray
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Surface treatment of titanium containing hardmasks
- Patent number 11,556,057
- Issue date Jan 17, 2023
- International Business Machines Corporation
- Ekmini A. De Silva
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Organic photoresist adhesion to metal oxide hardmasks
- Patent number 11,543,751
- Issue date Jan 3, 2023
- International Business Machines Corporation
- Abraham Arceo de la Pena
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Partial wrap around top contact
- Patent number 11,521,894
- Issue date Dec 6, 2022
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE ENCAPSULATION FOR METAL ELECTRODES OF EMBEDDED MEMORY DEV...
- Publication number 20230403951
- Publication date Dec 14, 2023
- International Business Machines Corporation
- Ashim DUTTA
Information Patent Application
FABRICATION OF EMBEDDED MEMORY DEVICES UTILIZING A SELF ASSEMBLED M...
- Publication number 20230363179
- Publication date Nov 9, 2023
- International Business Machines Corporation
- Ashim DUTTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADDITIVE INTERCONNECT FORMATION
- Publication number 20230290682
- Publication date Sep 14, 2023
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL FIELD EFFECT TRANSISTOR WITH CROSSLINK FIN ARRANGEMENT
- Publication number 20230207632
- Publication date Jun 29, 2023
- International Business Machines Corporation
- Indira Seshadri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE GATE CAP FOR SELF-ALIGNED CONTACTS
- Publication number 20230187549
- Publication date Jun 15, 2023
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC REFLOW FOR BOUNDARY CONTROL
- Publication number 20230170348
- Publication date Jun 1, 2023
- International Business Machines Corporation
- Jing Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-DENSITY RESISTIVE RANDOM-ACCESS MEMORY ARRAY WITH SELF-ALIGNED...
- Publication number 20230147958
- Publication date May 11, 2023
- International Business Machines Corporation
- Dexin Kong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION OF BACK-END-OF-LINE INTERCONNECTS
- Publication number 20230096938
- Publication date Mar 30, 2023
- International Business Machines Corporation
- Chi-Chun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMBEDDED MEMORY PILLAR
- Publication number 20230099303
- Publication date Mar 30, 2023
- International Business Machines Corporation
- Dexin Kong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL TRANSPORT FIELD-EFFECT TRANSISTOR WITH GATE PATTERNING
- Publication number 20230101011
- Publication date Mar 30, 2023
- International Business Machines Corporation
- RUILONG XIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRGAP ISOLATION FOR BACK-END-OF-THE-LINE SEMICONDUCTOR INTERCONNEC...
- Publication number 20230099965
- Publication date Mar 30, 2023
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHO-LITHO-ETCH (LLE) MULTI COLOR RESIST
- Publication number 20230096374
- Publication date Mar 30, 2023
- International Business Machines Corporation
- Yann Mignot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBTRACTIVE PATTERNING OF INTERCONNECT STRUCTURES
- Publication number 20230084739
- Publication date Mar 16, 2023
- International Business Machines Corporation
- Dominik Metzler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VIA CD CONTROLLABLE TOP VIA STRUCTURE
- Publication number 20230078008
- Publication date Mar 16, 2023
- International Business Machines Corporation
- Koichi Motoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR BOUNDARY PROTECTION USING REVERSIBLE CROSSLINKING REFLOW
- Publication number 20230026989
- Publication date Jan 26, 2023
- International Business Machines Corporation
- Jing Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN ON SCAFFOLD FILM FOR FORMING TOPVIA
- Publication number 20220406657
- Publication date Dec 22, 2022
- International Business Machines Corporation
- SOMNATH GHOSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING COPOLYMER CHAIN SCISSION PHOTORESISTS
- Publication number 20220390845
- Publication date Dec 8, 2022
- International Business Machines Corporation
- Dario Goldfarb
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FORMING SELF-ALIGNED MULTI-METAL INTERCONNECTS
- Publication number 20220262736
- Publication date Aug 18, 2022
- International Business Machines Corporation
- Ashim DUTTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW CAPACITANCE LOW RC WRAP-AROUND-CONTACT
- Publication number 20220199787
- Publication date Jun 23, 2022
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL FIELD EFFECT TRANSISTOR WITH CROSSLINK FIN ARRANGEMENT
- Publication number 20220199776
- Publication date Jun 23, 2022
- International Business Machines Corporation
- Indira Seshadri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGGERED STACKED VERTICAL CRYSTALLINE SEMICONDUCTING CHANNELS
- Publication number 20220149042
- Publication date May 12, 2022
- International Business Machines Corporation
- Tsung-Sheng Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CREATING DIFFERENT WIDTH LINES AND SPACES IN A METAL LAYER
- Publication number 20220093414
- Publication date Mar 24, 2022
- International Business Machines Corporation
- Christopher J Penny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLYMER BRUSH ADHESION PROMOTER WITH UV CLEAVABLE LINKER
- Publication number 20220043353
- Publication date Feb 10, 2022
- International Business Machines Corporation
- Jing Guo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLACING TOP VIAS AT LINE ENDS BY SELECTIVE GROWTH OF VIA MASK FROM...
- Publication number 20220028784
- Publication date Jan 27, 2022
- International Business Machines Corporation
- Ashim DUTTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Partial Wrap Around Top Contact
- Publication number 20220020634
- Publication date Jan 20, 2022
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Using E0 Exposures for Track/Cluster Monitoring
- Publication number 20220019139
- Publication date Jan 20, 2022
- International Business Machines Corporation
- Cody J. Murray
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RESIST UNDERLAYER SURFACE MODIFICATION
- Publication number 20220011670
- Publication date Jan 13, 2022
- International Business Machines Corporation
- Jing Guo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPACER-DEFINED PROCESS FOR LITHOGRAPHY-ETCH DOUBLE PATTERNING FOR I...
- Publication number 20220013405
- Publication date Jan 13, 2022
- International Business Machines Corporation
- Nelson Felix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CUT PATTERNING AND ETCHING TO MINIMIZE INTERLAYER DIELECTRIC...
- Publication number 20220005698
- Publication date Jan 6, 2022
- International Business Machines Corporation
- Kisup Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INVERSE TONE PILLAR PRINTING
- Publication number 20210398816
- Publication date Dec 23, 2021
- International Business Machines Corporation
- Nelson Felix
- H01 - BASIC ELECTRIC ELEMENTS

Ekmini A. De Silva

Person

Patents Grantslast 30 patents

Airgap isolation for back-end-of-the-line semiconductor interconnec...

Litho-litho-etch (LLE) multi color resist

Subtractive patterning of interconnect structures

Polymer brush adhesion promoter with UV cleavable linker

Vertical field effect transistor with crosslink fin arrangement

Metal cut patterning and etching to minimize interlayer dielectric...

Selective shrink for contact trench

Via CD controllable top via structure

Forming self-aligned multi-metal interconnects

Vertical transport field-effect transistor with gate patterning

Alternating copolymer chain scission photoresists

High-density resistive random-access memory array with self-aligned...

Placing top vias at line ends by selective growth of via mask from...

Transistor boundary protection using reversible crosslinking reflow

Spacer-defined process for lithography-etch double patterning for i...

Selective encapsulation for metal electrodes of embedded memory dev...

Staggered stacked vertical crystalline semiconducting channels

Embedded memory pillar

Fabrication of embedded memory devices utilizing a self assembled m...

Inverse tone pillar printing method using organic planarizing layer...

Semiconductor device with linerless contacts

Spin on scaffold film for forming topvia

EUV pattern transfer using graded hardmask

Fabrication of back-end-of-line interconnects

Vertical field effect transistor with crosslink fin arrangement

Dielectric structure to prevent hard mask erosion

Using E0 exposures for track/cluster monitoring

Surface treatment of titanium containing hardmasks

Organic photoresist adhesion to metal oxide hardmasks

Partial wrap around top contact

Patents Applicationslast 30 patents

SELECTIVE ENCAPSULATION FOR METAL ELECTRODES OF EMBEDDED MEMORY DEV...

FABRICATION OF EMBEDDED MEMORY DEVICES UTILIZING A SELF ASSEMBLED M...

ADDITIVE INTERCONNECT FORMATION

VERTICAL FIELD EFFECT TRANSISTOR WITH CROSSLINK FIN ARRANGEMENT

SELECTIVE GATE CAP FOR SELF-ALIGNED CONTACTS

DIELECTRIC REFLOW FOR BOUNDARY CONTROL

HIGH-DENSITY RESISTIVE RANDOM-ACCESS MEMORY ARRAY WITH SELF-ALIGNED...

FABRICATION OF BACK-END-OF-LINE INTERCONNECTS

EMBEDDED MEMORY PILLAR

VERTICAL TRANSPORT FIELD-EFFECT TRANSISTOR WITH GATE PATTERNING

AIRGAP ISOLATION FOR BACK-END-OF-THE-LINE SEMICONDUCTOR INTERCONNEC...

LITHO-LITHO-ETCH (LLE) MULTI COLOR RESIST

SUBTRACTIVE PATTERNING OF INTERCONNECT STRUCTURES

VIA CD CONTROLLABLE TOP VIA STRUCTURE

TRANSISTOR BOUNDARY PROTECTION USING REVERSIBLE CROSSLINKING REFLOW

SPIN ON SCAFFOLD FILM FOR FORMING TOPVIA

ALTERNATING COPOLYMER CHAIN SCISSION PHOTORESISTS

FORMING SELF-ALIGNED MULTI-METAL INTERCONNECTS

LOW CAPACITANCE LOW RC WRAP-AROUND-CONTACT

VERTICAL FIELD EFFECT TRANSISTOR WITH CROSSLINK FIN ARRANGEMENT

STAGGERED STACKED VERTICAL CRYSTALLINE SEMICONDUCTING CHANNELS

CREATING DIFFERENT WIDTH LINES AND SPACES IN A METAL LAYER

POLYMER BRUSH ADHESION PROMOTER WITH UV CLEAVABLE LINKER

PLACING TOP VIAS AT LINE ENDS BY SELECTIVE GROWTH OF VIA MASK FROM...

Partial Wrap Around Top Contact

Using E0 Exposures for Track/Cluster Monitoring

RESIST UNDERLAYER SURFACE MODIFICATION

SPACER-DEFINED PROCESS FOR LITHOGRAPHY-ETCH DOUBLE PATTERNING FOR I...

METAL CUT PATTERNING AND ETCHING TO MINIMIZE INTERLAYER DIELECTRIC...

INVERSE TONE PILLAR PRINTING