Elena Starodub

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for cleaning objects in a chamber of an optic...
- Patent number 9,156,068
- Issue date Oct 13, 2015
- KLA-Tencor Corporation
- Leonard E. Klebanoff
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR CLEANING OBJECTS IN A CHAMBER OF AN OPTIC...
- Publication number 20140374619
- Publication date Dec 25, 2014
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Application
OPTICAL COMPONENT WITH BLOCKING SURFACE AND METHOD THEREOF
- Publication number 20140158914
- Publication date Jun 12, 2014
- Leonard E. Klebanoff
- G02 - OPTICS