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Eli Jeon
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Sherwood, OR, US
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Patents Grants
last 30 patents
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Patent Grant
Symmetric precursor delivery
Patent number
11,021,792
Issue date
Jun 1, 2021
Lam Research Corporation
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Carrier ring structure and chamber systems including the same
Patent number
10,242,848
Issue date
Mar 26, 2019
Lam Research Corporation
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
APPARATUSES FOR UNIFORM FLUID DELIVERY IN A MULTI-STATION SEMICONDU...
Publication number
20240222151
Publication date
Jul 4, 2024
LAM RESEARCH CORPORATION
Eli Jeon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-FEATURE WET ETCH RATE RATIO REDUCTION
Publication number
20230220544
Publication date
Jul 13, 2023
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS TO ENABLE SEAMLESS HIGH QUALITY GAPFILL
Publication number
20220384186
Publication date
Dec 1, 2022
LAM RESEARCH CORPORATION
Douglas Walter Agnew
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYMMETRIC PRECURSOR DELIVERY
Publication number
20210238743
Publication date
Aug 5, 2021
LAM RESEARCH CORPORATION
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYMMETRIC PRECURSOR DELIVERY
Publication number
20200056288
Publication date
Feb 20, 2020
LAM RESEARCH CORPORATION
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Carrier Ring Structure and Chamber Systems Including the Same
Publication number
20160172165
Publication date
Jun 16, 2016
LAM RESEARCH CORPORATION
Eli Jeon
H01 - BASIC ELECTRIC ELEMENTS