Elina Szeto

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Optical metrology of multiple patterned layers
- Patent number 7,522,293
- Issue date Apr 21, 2009
- Tokyo Electron Limited
- Li Wu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Optical metrology of multiple patterned layers
- Publication number 20070229854
- Publication date Oct 4, 2007
- Timbre Technologies, Inc.
- Li Wu
- G01 - MEASURING TESTING