Elisabeth Camerotto

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Heverlee, BE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning semiconductor substrates
- Patent number 9,378,989
- Issue date Jun 28, 2016
- IMEC
- Paul Mertens
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Cleaning Semiconductor Substrates
- Publication number 20120266912
- Publication date Oct 25, 2012
- Katholieke Universiteit Leuven, K.U.Leuven R&D
- Paul Mertens
- B08 - CLEANING