Elisha Tam

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Pedestal with multi-zone temperature control and multiple purge cap...
- Patent number 10,062,587
- Issue date Aug 28, 2018
- Applied Materials, Inc.
- Xinglong Chen
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Pedestal with multi-zone temperature control and multiple purge cap...
- Patent number 9,267,739
- Issue date Feb 23, 2016
- Applied Materials, Inc.
- Xinglong Chen
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
PEDESTAL WITH MULTI-ZONE TEMPERATURE CONTROL AND MULTIPLE PURGE CAP...
- Publication number 20160126118
- Publication date May 5, 2016
- Applied Materials, Inc.
- Xinglong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL WITH MULTI-ZONE TEMPERATURE CONTROL AND MULTIPLE PURGE CAP...
- Publication number 20140021673
- Publication date Jan 23, 2014
- Applied Materials, Inc.
- Xinglong Chen
- F28 - HEAT EXCHANGE IN GENERAL