Elizabeth A. Boylan

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Big Flats, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Chuck heater for improved planar deposition process
- Patent number 6,328,807
- Issue date Dec 11, 2001
- Corning Incorporated
- Heather D. Boek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...