Elizabeth Apen

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West Linn, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Diffusion barrier and etch stop films
- Patent number 8,669,181
- Issue date Mar 11, 2014
- Novellus Systems, Inc.
- Yongsik Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing UV and dielectric diffusion barrier interaction through th...
- Patent number 8,124,522
- Issue date Feb 28, 2012
- Novellus Systems, Inc.
- Hui-Jung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion barrier and etch stop films
- Patent number 7,915,166
- Issue date Mar 29, 2011
- Novellus Systems, Inc.
- Yongsik Yu
- H01 - BASIC ELECTRIC ELEMENTS