Elizabeth Stone

Follow

Person

Stamford, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus, substrate table, and non-uniform coating me...
- Patent number 11,887,881
- Issue date Jan 30, 2024
- ASML Holding N.V.
- Bruce Tirri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lithographic apparatus and method for illumination uniformity corre...
- Patent number 8,629,973
- Issue date Jan 14, 2014
- ASML Holding N.V.
- Richard Carl Zimmerman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
De-focus uniformity correction
- Patent number 7,333,176
- Issue date Feb 19, 2008
- ASML Holding N.V.
- Roberto B. Wiener
- G02 - OPTICS
Information Patent Grant
Method for calculating an intensity integral for use in lithography...
- Patent number 7,173,688
- Issue date Feb 6, 2007
- ASML Holding N.V.
- Roberto B. Wiener
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING ME...
- Publication number 20220216092
- Publication date Jul 7, 2022
- ASML Holding N.V.
- Bruce TIRRI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lithographic Apparatus and Method for Illumination Uniformity Corre...
- Publication number 20100302525
- Publication date Dec 2, 2010
- ASML Holding N.V.
- Richard Carl ZIMMERMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
De-focus uniformity correction
- Publication number 20070109518
- Publication date May 17, 2007
- ASML Holding N.V.
- Roberto B. Wiener
- G02 - OPTICS
Information Patent Application
De-focus uniformity correction
- Publication number 20060139608
- Publication date Jun 29, 2006
- ASML Holding N.V.
- Roberto B. Wiener
- G02 - OPTICS