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Elizabeth THOMAS
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Danbury, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Compositions and methods for post-CMP cleaning of cobalt substrates
Patent number
11,845,917
Issue date
Dec 19, 2023
Entegris, Inc.
Daniela White
B08 - CLEANING
Information
Patent Grant
Cleaning composition with corrosion inhibitor
Patent number
11,149,235
Issue date
Oct 19, 2021
Entegris, Inc.
Daniela White
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Non-amine post-CMP compositions and method of use
Patent number
11,127,587
Issue date
Sep 21, 2021
Entegris, Inc.
Jun Liu
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Post CMP cleaning composition
Patent number
11,124,746
Issue date
Sep 21, 2021
Entegris, Inc.
Daniela White
B08 - CLEANING
Information
Patent Grant
Post CMP cleaning compositions for ceria particles
Patent number
11,085,011
Issue date
Aug 10, 2021
Entegris, Inc.
Elizabeth Thomas
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Post chemical mechanical polishing formulations and method of use
Patent number
10,351,809
Issue date
Jul 16, 2019
Entegris, Inc.
Elizabeth Thomas
B08 - CLEANING
Information
Patent Grant
Post-CMP removal using compositions and method of use
Patent number
10,176,979
Issue date
Jan 8, 2019
Entegris, Inc.
Jun Liu
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
Microelectronic Device Cleaning Composition
Publication number
20220106541
Publication date
Apr 7, 2022
Entegris, Inc.
Elizabeth THOMAS
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
COMPOSITIONS AND METHODS FOR POST-CMP CLEANING OF COBALT SUBSTRATES
Publication number
20200199500
Publication date
Jun 25, 2020
Entegris, Inc.
Daniela WHITE
B08 - CLEANING
Information
Patent Application
POST CMP CLEANING COMPOSITION
Publication number
20200148979
Publication date
May 14, 2020
Entegris, Inc.
Daniela WHITE
B08 - CLEANING
Information
Patent Application
POST CMP CLEANING COMPOSITIONS FOR CERIA PARTICLES
Publication number
20200071642
Publication date
Mar 5, 2020
Entegris, Inc.
Elizabeth THOMAS
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
CLEANING COMPOSITION WITH CORROSION INHIBITOR
Publication number
20200024554
Publication date
Jan 23, 2020
Entegris, Inc.
Daniela WHITE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POST CHEMICAL MECHANICAL POLISHING FORMULATIONS AND METHOD OF USE
Publication number
20180037852
Publication date
Feb 8, 2018
ENTEGRIC, INC.
Elizabeth THOMAS
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
NON-AMINE POST-CMP COMPOSITIONS AND METHOD OF USE
Publication number
20160351388
Publication date
Dec 1, 2016
Entegris, Inc.
Jun LIU
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
COPPER CLEANING AND PROTECTION FORMULATIONS
Publication number
20160075971
Publication date
Mar 17, 2016
Advanced Technology Materials, Inc.
Jun LIU
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
POST-CMP REMOVAL USING COMPOSITIONS AND METHOD OF USE
Publication number
20160020087
Publication date
Jan 21, 2016
Entegris, Inc.
Jun LIU
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...