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Elizabeth Wu

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  • San Jose, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Slit valve having increased flow uniformity
    • Patent number 9,423,042
    • Issue date Aug 23, 2016
    • Applied Materials, Inc.
    • Chandrasekhar Balasubramanyam
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Slit valve having increased flow uniformity
    • Patent number 8,377,213
    • Issue date Feb 19, 2013
    • Applied Materials, Inc.
    • Chandrasekhar Balasubramanyam
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SLIT VALVE HAVING INCREASED FLOW UNIFORMITY
    • Publication number 20130153807
    • Publication date Jun 20, 2013
    • Applied Materials, Inc.
    • CHANDRASEKHAR BALASUBRAMANYAM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SLIT VALVE HAVING INCREASED FLOW UNIFORMITY
    • Publication number 20090272324
    • Publication date Nov 5, 2009
    • Applied Materials, Inc.
    • CHANDRASEKHAR BALASUBRAMANYAM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...