Elke Erben

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming a high quality interfacial layer for a semiconduc...
- Patent number 10,109,492
- Issue date Oct 23, 2018
- GLOBALFOUNDRIES Inc.
- Gabriela Dilliway
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sandwich silicidation for fully silicided gate formation
- Patent number 9,236,440
- Issue date Jan 12, 2016
- GLOBALFOUNDRIES Inc.
- Roman Boschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating integrated circuits with fluorine passivation
- Patent number 8,791,003
- Issue date Jul 29, 2014
- GLOBALFOUNDRIES, INC.
- Dina Triyoso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivating point defects in high-K gate dielectric layers during g...
- Patent number 8,658,490
- Issue date Feb 25, 2014
- GLOBALFOUNDRIES Inc.
- Elke Erben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating integrated circuits with narrow, metal fill...
- Patent number 8,652,890
- Issue date Feb 18, 2014
- GLOBALFOUNDRIES, INC.
- Sven Schmidbauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating integrated circuits with controlled P-chann...
- Patent number 8,420,519
- Issue date Apr 16, 2013
- GLOBALFOUNDRIES, INC.
- Dina Triyoso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method for a transition-metal-containing dielectric
- Patent number 7,666,752
- Issue date Feb 23, 2010
- Qimonda AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a dielectric layer and corresponding semico...
- Patent number 7,531,405
- Issue date May 12, 2009
- Qimonds AG
- Andreas Spitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TRANSISTOR DEVICE WITH STRAINED LAYER
- Publication number 20150179740
- Publication date Jun 25, 2015
- GLOBAL FOUNDRIES Inc.
- Dina H. Triyoso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SANDWICH SILICIDATION FOR FULLY SILICIDED GATE FORMATION
- Publication number 20150162414
- Publication date Jun 11, 2015
- GLOBALFOUNDRIES Inc.
- Roman Boschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A HIGH QUALITY INTERFACIAL LAYER FOR A SEMICONDUC...
- Publication number 20140242788
- Publication date Aug 28, 2014
- GLOBALFOUNDRIES INC.
- Gabriela Dilliway
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH FLUORINE PASSIVATION
- Publication number 20130344692
- Publication date Dec 26, 2013
- GLOBALFOUNDRIES INC.
- Dina Triyoso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED DEVICE RELIABILITY OF A SEMICONDUCTOR DEVICE BY PROVIDING...
- Publication number 20130280873
- Publication date Oct 24, 2013
- GLOBALFOUNDRIES INC.
- Elke Erben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVATING POINT DEFECTS IN HIGH-K GATE DIELECTRIC LAYERS DURING G...
- Publication number 20130267086
- Publication date Oct 10, 2013
- GLOBALFOUNDRIES INC.
- Elke Erben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH NARROW, METAL FILL...
- Publication number 20130224927
- Publication date Aug 29, 2013
- GLOBALFOUNDRIES INC.
- Sven Schmidbauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH CONTROLLED P-CHANN...
- Publication number 20130109166
- Publication date May 2, 2013
- GLOBALFOUNDRIES INC.
- Dina Triyoso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A DIELECTRIC LAYER
- Publication number 20080176375
- Publication date Jul 24, 2008
- Qimonda AG
- Elke Erben
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition method for a transition-metal-containing dielectric
- Publication number 20080173919
- Publication date Jul 24, 2008
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS AND STARTING MATERIAL FOR PROVIDING A GASEOUS PRE...
- Publication number 20070269598
- Publication date Nov 22, 2007
- Alfred Kersch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Automatic layer deposition process
- Publication number 20070161180
- Publication date Jul 12, 2007
- Infineon Technologies AG
- Elke Erben
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing a dielectric layer and corresponding semico...
- Publication number 20060192271
- Publication date Aug 31, 2006
- Infineon Technologies AG
- Andreas Spitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method of forming a high quality interfacial layer for a semiconduc...

Sandwich silicidation for fully silicided gate formation

Methods for fabricating integrated circuits with fluorine passivation

Passivating point defects in high-K gate dielectric layers during g...

Methods for fabricating integrated circuits with narrow, metal fill...

Methods for fabricating integrated circuits with controlled P-chann...

Deposition method for a transition-metal-containing dielectric

Method of manufacturing a dielectric layer and corresponding semico...

Patents Applicationslast 30 patents

TRANSISTOR DEVICE WITH STRAINED LAYER

SANDWICH SILICIDATION FOR FULLY SILICIDED GATE FORMATION

METHOD OF FORMING A HIGH QUALITY INTERFACIAL LAYER FOR A SEMICONDUC...

METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH FLUORINE PASSIVATION

ENHANCED DEVICE RELIABILITY OF A SEMICONDUCTOR DEVICE BY PROVIDING...

PASSIVATING POINT DEFECTS IN HIGH-K GATE DIELECTRIC LAYERS DURING G...

METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH NARROW, METAL FILL...

METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH CONTROLLED P-CHANN...

METHOD FOR FORMING A DIELECTRIC LAYER

Deposition method for a transition-metal-containing dielectric

METHOD, APPARATUS AND STARTING MATERIAL FOR PROVIDING A GASEOUS PRE...

Automatic layer deposition process

Method of manufacturing a dielectric layer and corresponding semico...