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Elke Van Loenhout
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Asten, NL
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last 30 patents
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Patent Grant
Method for correcting disturbances in a level sensor light path
Patent number
7,751,059
Issue date
Jul 6, 2010
ASML Netherlands B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and method for manufacturing a device
Patent number
7,542,127
Issue date
Jun 2, 2009
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for correcting disturbances in a level sensor light path
Patent number
7,411,667
Issue date
Aug 12, 2008
ASML Netherlands B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR CORRECTING DISTURBANCES IN A LEVEL SENSOR LIGHT PATH
Publication number
20080309915
Publication date
Dec 18, 2008
ASML NETHERLANDS B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and method for manufacturing a device
Publication number
20070139629
Publication date
Jun 21, 2007
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for correcting disturbances in a level sensor light path
Publication number
20060274324
Publication date
Dec 7, 2006
ASML NETHERLANDS B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING