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Ellen R. Laird
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Dimensional calibration standards
Patent number
7,453,571
Issue date
Nov 18, 2008
KLA-Tencor Corporation
Marco Tortonese
G01 - MEASURING TESTING
Information
Patent Grant
Dimensional calibration standards
Patent number
7,301,638
Issue date
Nov 27, 2007
KLA-Tencor, Inc.
Marco Tortonese
G01 - MEASURING TESTING
Information
Patent Grant
Submicron dimensional calibration standards and methods of manufact...
Patent number
6,646,737
Issue date
Nov 11, 2003
KLA Tencor Technologies
Marco Tortonese
G01 - MEASURING TESTING
Information
Patent Grant
Line width calibration standard manufacturing and certifying method
Patent number
6,358,860
Issue date
Mar 19, 2002
VLSI Standards, Inc.
Bradley W. Scheer
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for calibrating a topographic instrument
Patent number
5,677,765
Issue date
Oct 14, 1997
VLSI Standards, Inc.
Ellen R. Laird
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Formation of atomic scale vertical features for topographic instrum...
Patent number
5,599,464
Issue date
Feb 4, 1997
VLSI Standards, Inc.
Ellen R. Laird
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Submicron dimensional calibration standards and methods of manufact...
Publication number
20030058437
Publication date
Mar 27, 2003
Marco Tortonese
B82 - NANO-TECHNOLOGY