Eller Juco

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Closed-loop multiple-output radio frequency (RF) matching
- Patent number 12,136,938
- Issue date Nov 5, 2024
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impedance transformation in radio-frequency-assisted plasma generation
- Patent number 11,984,298
- Issue date May 14, 2024
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular recipe controlled calibration (MRCC) apparatus used to bala...
- Patent number 11,594,397
- Issue date Feb 28, 2023
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency (RF) signal source supplying RF plasma generator an...
- Patent number 11,557,460
- Issue date Jan 17, 2023
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular recipe controlled calibration (MRCC) apparatus used to bala...
- Patent number 10,991,550
- Issue date Apr 27, 2021
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable ground planes in plasma chambers
- Patent number 10,774,423
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arrangements for manipulating plasma confinement within a plasma pr...
- Patent number 10,217,610
- Issue date Feb 26, 2019
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for substrate clamping in a plasma chamber
- Patent number 9,337,072
- Issue date May 10, 2016
- Applied Materials, Inc.
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arrangements for manipulating plasma confinement within a plasma pr...
- Patent number 9,275,838
- Issue date Mar 1, 2016
- Lam Research Corporation
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated gas box for PECVD applications
- Patent number 7,628,863
- Issue date Dec 8, 2009
- Applied Materials, Inc.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Universal mid-frequency matching network
- Patent number 7,094,313
- Issue date Aug 22, 2006
- Applied Materials, Inc.
- Eller Y. Juco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for ceramic pedestal and metal shaft assembly
- Patent number 5,994,678
- Issue date Nov 30, 1999
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REMOTE PLASMA SOURCE
- Publication number 20250118538
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Kartik RAMASWAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING
- Publication number 20250015819
- Publication date Jan 9, 2025
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPEDANCE TRANSFORMATION IN RADIO-FREQUENCY-ASSISTED PLASMA GENERATION
- Publication number 20240258073
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALA...
- Publication number 20230245853
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPEDANCE TRANSFORMATION IN RADIO-FREQUENCY-ASSISTED PLASMA GENERATION
- Publication number 20220415616
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220285133
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Abhishek Chowdhury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING
- Publication number 20220190854
- Publication date Jun 16, 2022
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- G01 - MEASURING TESTING
Information Patent Application
RADIO FREQUENCY (RF) SIGNAL SOURCE SUPPLYING RF PLASMA GENERATOR AN...
- Publication number 20210257188
- Publication date Aug 19, 2021
- LAM RESEARCH CORPORATION
- Eller Y. JUCO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALA...
- Publication number 20210202208
- Publication date Jul 1, 2021
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Bala...
- Publication number 20200075289
- Publication date Mar 5, 2020
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE GROUND PLANES IN PLASMA CHAMBERS
- Publication number 20180073142
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNABLE GROUND PLANES IN PLASMA CHAMBERS
- Publication number 20160145742
- Publication date May 26, 2016
- Applied Materials, Inc.
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Arrangements for Manipulating Plasma Confinement Within a Plasma Pr...
- Publication number 20160126070
- Publication date May 5, 2016
- LAM RESEARCH CORPORATION
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE GROUND PLANES IN PLASMA CHAMBERS
- Publication number 20120205046
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER
- Publication number 20110090613
- Publication date Apr 21, 2011
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARRANGEMENTS FOR MANIPULATING PLASMA CONFINEMENT WITHIN A PLASMA PR...
- Publication number 20110049101
- Publication date Mar 3, 2011
- Eller Y. Juco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE GROUND PLANES IN PLASMA CHAMBERS
- Publication number 20090236214
- Publication date Sep 24, 2009
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER
- Publication number 20080084650
- Publication date Apr 10, 2008
- APPLIED MATERIALS, INC.
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated gas box for PECVD applications
- Publication number 20070107660
- Publication date May 17, 2007
- APPLIED MATERIALS, INC.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heated gas box for PECVD applications
- Publication number 20060027165
- Publication date Feb 9, 2006
- APPLIED MATERIALS, INC.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Universal mid-frquency matching network
- Publication number 20050235916
- Publication date Oct 27, 2005
- Applied Materials, Inc.
- Eller Y. Juco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Stress-tuned, single-layer silicon nitride film
- Publication number 20050170104
- Publication date Aug 4, 2005
- APPLIED MATERIALS, INC.
- KeeBum Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Closed-loop multiple-output radio frequency (RF) matching

Impedance transformation in radio-frequency-assisted plasma generation

Modular recipe controlled calibration (MRCC) apparatus used to bala...

Radio frequency (RF) signal source supplying RF plasma generator an...

Modular recipe controlled calibration (MRCC) apparatus used to bala...

Tunable ground planes in plasma chambers

Arrangements for manipulating plasma confinement within a plasma pr...

Apparatus and method for substrate clamping in a plasma chamber

Arrangements for manipulating plasma confinement within a plasma pr...

Heated gas box for PECVD applications

Universal mid-frequency matching network

Apparatus for ceramic pedestal and metal shaft assembly

Patents Applicationslast 30 patents

REMOTE PLASMA SOURCE

CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING

IMPEDANCE TRANSFORMATION IN RADIO-FREQUENCY-ASSISTED PLASMA GENERATION

MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALA...

IMPEDANCE TRANSFORMATION IN RADIO-FREQUENCY-ASSISTED PLASMA GENERATION

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING

RADIO FREQUENCY (RF) SIGNAL SOURCE SUPPLYING RF PLASMA GENERATOR AN...

MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALA...

Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Bala...

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

Arrangements for Manipulating Plasma Confinement Within a Plasma Pr...

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER

ARRANGEMENTS FOR MANIPULATING PLASMA CONFINEMENT WITHIN A PLASMA PR...

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER

Heated gas box for PECVD applications

Heated gas box for PECVD applications

Universal mid-frquency matching network

Stress-tuned, single-layer silicon nitride film