Ellis Chang

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for inspection of wafers and reticles using des...
- Patent number 11,348,222
- Issue date May 31, 2022
- KLA-Tencor Technologies Corp.
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for mixed mode wafer inspection
- Patent number 11,295,438
- Issue date Apr 5, 2022
- KLA Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for inspection of wafers and reticles using des...
- Patent number 10,713,771
- Issue date Jul 14, 2020
- KLA-Tencor Technologies Corp.
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metrology target identification, design and verification
- Patent number 10,387,608
- Issue date Aug 20, 2019
- KLA-Tencor Corporation
- Michael Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for mixed mode wafer inspection
- Patent number 10,192,303
- Issue date Jan 29, 2019
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metrology target identification, design and verification
- Patent number 9,910,953
- Issue date Mar 6, 2018
- KLA-Tencor Corporation
- Michael Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Computer-implemented methods, computer-readable media, and systems...
- Patent number 9,659,670
- Issue date May 23, 2017
- KLA-Tencor Corp.
- SunYong Choi
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and system for universal target based inspection and metrology
- Patent number 9,576,861
- Issue date Feb 21, 2017
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metrology optimized inspection
- Patent number 9,518,932
- Issue date Dec 13, 2016
- KLA-Tencor Corp.
- Allen Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for utilizing design data in combination with i...
- Patent number 9,401,014
- Issue date Jul 26, 2016
- KLA-Tencor Technologies Corp.
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection guided overlay metrology
- Patent number 9,170,209
- Issue date Oct 27, 2015
- KLA-Tencor Corporation
- Ellis Chang
- G01 - MEASURING TESTING
Information Patent Grant
Rule checking for metrology and inspection
- Patent number 9,151,712
- Issue date Oct 6, 2015
- KLA-Tencor Corporation
- Michael Adel
- G01 - MEASURING TESTING
Information Patent Grant
Determining design coordinates for wafer defects
- Patent number 9,087,367
- Issue date Jul 21, 2015
- KLA-Tencor Corp.
- Ellis Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for inspection of wafers and reticles using des...
- Patent number 9,002,497
- Issue date Apr 7, 2015
- KLA-Tencor Technologies Corp.
- William Volk
- G01 - MEASURING TESTING
Information Patent Grant
Region based virtual fourier filter
- Patent number 8,989,479
- Issue date Mar 24, 2015
- KLA-Tencor Corporation
- Lisheng Gao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspecting a wafer and/or predicting one or more characteristics of...
- Patent number 8,948,495
- Issue date Feb 3, 2015
- KLA-Tencor Corp.
- Gino Marcuccilli
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for utilizing design data in combination with i...
- Patent number 8,923,600
- Issue date Dec 30, 2014
- KLA-Tencor Technologies Corp.
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Alteration for wafer inspection
- Patent number 8,826,200
- Issue date Sep 2, 2014
- KLA-Tencor Corp.
- Allen Park
- G01 - MEASURING TESTING
Information Patent Grant
Scanner performance comparison and matching using design and defect...
- Patent number 8,594,823
- Issue date Nov 26, 2013
- KLA-Tencor Corporation
- Allen Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection guided overlay metrology
- Patent number 8,559,001
- Issue date Oct 15, 2013
- KLA-Tencor Corporation
- Ellis Chang
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for using electrical information for a device b...
- Patent number 8,194,968
- Issue date Jun 5, 2012
- KLA-Tencor Corp.
- Allen Park
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a defect criticality index for...
- Patent number 8,139,844
- Issue date Mar 20, 2012
- KLA-Tencor Corp.
- Chien-Huei (Adam) Chen
- G01 - MEASURING TESTING
Information Patent Grant
Determining locations on a wafer to be reviewed during defect review
- Patent number 7,904,845
- Issue date Mar 8, 2011
- KLA-Tencor Corp.
- Christophe Fouquet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Computer-implemented methods, carrier media, and systems for genera...
- Patent number 7,711,514
- Issue date May 4, 2010
- KLA-Tencor Technologies Corp.
- Allen Park
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for generating a design rule map having spatially varying ov...
- Patent number 7,571,422
- Issue date Aug 4, 2009
- KLA-Tencor Technologies Corporation
- Michael Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for utilizing design data in combination with i...
- Patent number 7,570,796
- Issue date Aug 4, 2009
- KLA-Tencor Technologies Corp.
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION
- Publication number 20220230293
- Publication date Jul 21, 2022
- KLA Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...
- Publication number 20200074619
- Publication date Mar 5, 2020
- KLA-Tencor Technologies Corporation
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Mixed Mode Wafer Inspection
- Publication number 20190108630
- Publication date Apr 11, 2019
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...
- Publication number 20180247403
- Publication date Aug 30, 2018
- KLA-Tencor Technologies Corporation
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY TARGET IDENTIFICATION, DESIGN AND VERIFICATION
- Publication number 20180032662
- Publication date Feb 1, 2018
- KLA-Tencor Corporation
- Michael Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
USING THREE-DIMENSIONAL REPRESENTATIONS FOR DEFECT-RELATED APPLICAT...
- Publication number 20170161418
- Publication date Jun 8, 2017
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY TARGET INDENTIFICATION, DESIGN AND VERIFICATION
- Publication number 20160196379
- Publication date Jul 7, 2016
- Michael Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Inspection of Wafers and Reticles Using Des...
- Publication number 20150178914
- Publication date Jun 25, 2015
- KLA-Tencor Technologies Corporation
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Utilizing Design Data in Combination with I...
- Publication number 20150154746
- Publication date Jun 4, 2015
- KLA-Tencor Technologies Corporation
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Metrology Optimized Inspection
- Publication number 20150124247
- Publication date May 7, 2015
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
Detecting IC Reliability Defects
- Publication number 20150120220
- Publication date Apr 30, 2015
- KLA-Tencor Corporation
- Joanne Wu
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Universal Target Based Inspection and Metrology
- Publication number 20140199791
- Publication date Jul 17, 2014
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Mixed Mode Wafer Inspection
- Publication number 20140153814
- Publication date Jun 5, 2014
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspecting a Wafer and/or Predicting One or More Characteristics of...
- Publication number 20140037187
- Publication date Feb 6, 2014
- Gino Marcuccilli
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Design Alteration for Wafer Inspection
- Publication number 20130318485
- Publication date Nov 28, 2013
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
Determining Design Coordinates for Wafer Defects
- Publication number 20130064442
- Publication date Mar 14, 2013
- KLA-Tencor Corporation
- Ellis Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Using Three-Dimensional Representations for Defect-Related Applicat...
- Publication number 20120316855
- Publication date Dec 13, 2012
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
REGION BASED VIRTUAL FOURIER FILTER
- Publication number 20120141013
- Publication date Jun 7, 2012
- KLA-Tencor Corporation
- Lisheng Gao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS...
- Publication number 20110187848
- Publication date Aug 4, 2011
- KLA-Tencor Corporation
- SunYong Choi
- G11 - INFORMATION STORAGE
Information Patent Application
INSPECTION GUIDED OVERLAY METROLOGY
- Publication number 20110170091
- Publication date Jul 14, 2011
- KLA-Tencor Corporation
- Ellis Chang
- G01 - MEASURING TESTING
Information Patent Application
Scanner Performance Comparison And Matching Using Design And Defect...
- Publication number 20110172804
- Publication date Jul 14, 2011
- KLA-Tencor Corporation
- Allen Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...
- Publication number 20090297019
- Publication date Dec 3, 2009
- KLA-Tencor Technologies Corporation
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A DEFECT CRITICALITY INDEX FOR...
- Publication number 20090257645
- Publication date Oct 15, 2009
- Chien-Huei (Adam) Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR GENERA...
- Publication number 20090043527
- Publication date Feb 12, 2009
- Allen Park
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND SYSTEMS FOR USING ELECTRICAL INFORMATION FOR A DEVICE B...
- Publication number 20080167829
- Publication date Jul 10, 2008
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS, DESIGNS, DEFECT REVIEW TOOLS, AND SYSTEMS FOR DETERMINING...
- Publication number 20080163140
- Publication date Jul 3, 2008
- Christophe Fouquet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...
- Publication number 20080081385
- Publication date Apr 3, 2008
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR GENERATING A DESIGN RULE MAP HAVING SPATIALLY VARYING OV...
- Publication number 20080077894
- Publication date Mar 27, 2008
- KLA-Tencor Technologies Corporation
- Michael Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...
- Publication number 20070288219
- Publication date Dec 13, 2007
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and systems for inspection of wafers and reticles using des...
- Publication number 20050004774
- Publication date Jan 6, 2005
- William Volk
- G06 - COMPUTING CALCULATING COUNTING

Ellis Chang

Person

Patents Grantslast 30 patents

Methods and systems for inspection of wafers and reticles using des...

Method and system for mixed mode wafer inspection

Methods and systems for inspection of wafers and reticles using des...

Metrology target identification, design and verification

Method and system for mixed mode wafer inspection

Metrology target identification, design and verification

Computer-implemented methods, computer-readable media, and systems...

Method and system for universal target based inspection and metrology

Metrology optimized inspection

Methods and systems for utilizing design data in combination with i...

Inspection guided overlay metrology

Rule checking for metrology and inspection

Determining design coordinates for wafer defects

Methods and systems for inspection of wafers and reticles using des...

Region based virtual fourier filter

Inspecting a wafer and/or predicting one or more characteristics of...

Methods and systems for utilizing design data in combination with i...

Alteration for wafer inspection

Scanner performance comparison and matching using design and defect...

Inspection guided overlay metrology

Methods and systems for using electrical information for a device b...

Methods and systems for determining a defect criticality index for...

Determining locations on a wafer to be reviewed during defect review

Computer-implemented methods, carrier media, and systems for genera...

Method for generating a design rule map having spatially varying ov...

Methods and systems for utilizing design data in combination with i...

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION

METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...

Method and System for Mixed Mode Wafer Inspection

METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...

METROLOGY TARGET IDENTIFICATION, DESIGN AND VERIFICATION

USING THREE-DIMENSIONAL REPRESENTATIONS FOR DEFECT-RELATED APPLICAT...

METROLOGY TARGET INDENTIFICATION, DESIGN AND VERIFICATION

Methods and Systems for Inspection of Wafers and Reticles Using Des...

Methods and Systems for Utilizing Design Data in Combination with I...

Metrology Optimized Inspection

Detecting IC Reliability Defects

Method and System for Universal Target Based Inspection and Metrology

Method and System for Mixed Mode Wafer Inspection

Inspecting a Wafer and/or Predicting One or More Characteristics of...

Design Alteration for Wafer Inspection

Determining Design Coordinates for Wafer Defects

Using Three-Dimensional Representations for Defect-Related Applicat...

REGION BASED VIRTUAL FOURIER FILTER

COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS...

INSPECTION GUIDED OVERLAY METROLOGY

Scanner Performance Comparison And Matching Using Design And Defect...

METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...

METHODS AND SYSTEMS FOR DETERMINING A DEFECT CRITICALITY INDEX FOR...

COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR GENERA...

METHODS AND SYSTEMS FOR USING ELECTRICAL INFORMATION FOR A DEVICE B...

METHODS, DESIGNS, DEFECT REVIEW TOOLS, AND SYSTEMS FOR DETERMINING...

METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...

METHOD FOR GENERATING A DESIGN RULE MAP HAVING SPATIALLY VARYING OV...

METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...

Methods and systems for inspection of wafers and reticles using des...