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Elyakim Kassel
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D.N. Misgav, IL
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last 30 patents
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Patent Grant
Overlay metrology and control method
Patent number
7,804,994
Issue date
Sep 28, 2010
KLA-Tencor Technologies Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Overlay metrology and control method
Publication number
20030223630
Publication date
Dec 4, 2003
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY