Emanuel Saerchen

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Giessen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Delivery of light into a vacuum chamber using an optical fiber
- Patent number 11,302,590
- Issue date Apr 12, 2022
- KLA Corporation
- Emanuel Saerchen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor metrology based on hyperspectral imaging
- Patent number 10,801,953
- Issue date Oct 13, 2020
- KLA-Tencor Corporation
- David Y. Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER
- Publication number 20200266116
- Publication date Aug 20, 2020
- KLA Corporation
- Emanuel Saerchen
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor Metrology Based On Hyperspectral Imaging
- Publication number 20200225151
- Publication date Jul 16, 2020
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING