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Emanuele Cappello
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Saratoga, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for reducing particle contamination on wafer b...
Patent number
6,413,321
Issue date
Jul 2, 2002
Applied Materials, Inc.
Bok Hoen Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...