Emery Kuo

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
High density plasma etchback process for advanced metallization app...
- Patent number 8,431,033
- Issue date Apr 30, 2013
- Novellus Systems, Inc.
- Chunming Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LOAD LOCK ASSEMBLY AND METHOD FOR PARTICLE REDUCTION
- Publication number 20120211029
- Publication date Aug 23, 2012
- Viraj S. Pandit
- B08 - CLEANING
Information Patent Application
HIGH DENSITY PLASMA ETCHBACK PROCESS FOR ADVANCED METALLIZATION APP...
- Publication number 20120152896
- Publication date Jun 21, 2012
- Chunming Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...