Emi Matsui

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,322,384
- Issue date May 3, 2022
- Shin-Etsu Engineering Co., Ltd.
- Shunya Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suction stage, lamination device, and method for manufacturing lami...
- Patent number 10,586,727
- Issue date Mar 10, 2020
- Shibaura Mechatronics Corporation
- Emi Matsui
- B32 - LAYERED PRODUCTS
Information Patent Grant
Liquid feeding device and substrate treating device
- Patent number 9,811,096
- Issue date Nov 7, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Bonding apparatus and bonding process method
- Patent number 9,741,596
- Issue date Aug 22, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210098279
- Publication date Apr 1, 2021
- SHIN-ETSU ENGINEERING CO., LTD
- Shunya KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUCTION STAGE, LAMINATION DEVICE, AND METHOD FOR MANUFACTURING LAMI...
- Publication number 20160225655
- Publication date Aug 4, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Emi Matsui
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE, PEELING METHOD FOR LAMINATED SUBSTRATE,...
- Publication number 20160225613
- Publication date Aug 4, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Takahiro Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID FEEDING DEVICE AND SUBSTRATE TREATING DEVICE
- Publication number 20160062372
- Publication date Mar 3, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
BONDING APPARATUS AND BONDING PROCESS METHOD
- Publication number 20140182761
- Publication date Jul 3, 2014
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS