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Emiko HARA

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  • Nirasaki City, Yamanashi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Microwave Plasma Source and Plasma Processing Apparatus
    • Publication number 20170032933
    • Publication date Feb 2, 2017
    • TOKYO ELECTRON LIMITED
    • Tamotsu HARADA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING DEVICE
    • Publication number 20160222516
    • Publication date Aug 4, 2016
    • TOKYO ELECTRON LIMITED
    • Taro IKEDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...